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Optical functions of uniaxial rutile and anatase (TiO2) revisited

Journal Article · · Surface Science Spectra
DOI:https://doi.org/10.1116/6.0003719· OSTI ID:2406770

In this study, the optical functions of uniaxial rutile and anatase (TiO2) were determined from 200 to 850 nm (6.2 to 1.46 eV) using several of four optical techniques: (1) standard spectroscopic two-modulator generalized ellipsometry (2-MGE), (2) near-normal-incidence two-modulator generalized ellipsometry microscopy (2-MGEM), (3) Mueller matrix transmission of rutile, and (4) polarized transmission of rutile. The 2-MGE measurements yielded highly accurate values of the dielectric functions and error estimates from 1.46 to 6.2 eV, whereas the polarization-dependent transmission yielded more accurate values of the absorption coefficient below the band edge of rutile. The 2-MGEM also measured the diattenuation, which is related to the birefringence, and other parameters but at near-normal incidence at a single wavelength (577 nm).

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
AC05-00OR22725
OSTI ID:
2406770
Journal Information:
Surface Science Spectra, Journal Name: Surface Science Spectra Journal Issue: 2 Vol. 31; ISSN 1055-5269
Publisher:
American Vacuum Society - AIPCopyright Statement
Country of Publication:
United States
Language:
English

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