High-Precision Low-Cost Micro Birdbath Resonating Gyroscope (CRADA Final Report)
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
As part of the Cyclotron Road program, Enertia Microsystems Inc. (EMI) investigated a high-performance micro mechanical resonator called the micro birdbath resonator and a high-precision micro electromechanical systems (MEMS) gyroscope called the birdbath resonator gyroscope (BRG). The BRG is a novel fused-silica MEMS gyroscope. The BRG can obtain significantly greater accuracy, comparable size, and comparable cost with MEMS gyroscopes made of silicon that are currently on the market.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Enertia Microsystems Inc., Ann Arbor, MI (United States)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Materials & Manufacturing Technologies Office (AMMTO)
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 2372721
- Report Number(s):
- LBNL--2001579; FP00013635; AWD00005714
- Country of Publication:
- United States
- Language:
- English
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