Optimizing the quality factor of InP nanobeam cavities using atomic layer deposition

Rahaman, Mohammad Habibur; Lee, Chang-Min; Buyukkaya, Mustafa Atabey; Harper, Samuel; Islam, Fariba; Addamane, Sadhvikas Jayachandra; Waks, Edo

doi:10.1063/5.0190964

Optimizing the quality factor of InP nanobeam cavities using atomic layer deposition

Journal Article · Wed May 01 00:00:00 EDT 2024 · Applied Physics Letters

DOI:https://doi.org/10.1063/5.0190964· OSTI ID:2349191

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Univ. of Maryland, College Park, MD (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Center for Integrated Nanotechnologies

Photonic crystal nanobeam cavities are valued for their small mode volume, CMOS compatibility, and high coupling efficiency-crucial features for various low-power photonic applications and quantum information processing. However, despite their potential, nanobeam cavities often suffer from low quality factors due to fabrication imperfections that create surface states and optical absorption. In this work, we demonstrate InP nanobeam cavities with up to 140% higher quality factors by applying a coating of Al₂O₃ via atomic layer deposition to terminate dangling bonds and reduce surface absorption. Additionally, changing the deposition thickness allows precise tuning of the cavity mode wavelength without compromising the quality factor. This Al₂O₃ atomic layer deposition approach holds great promise for optimizing nanobeam cavities that are well-suited for integration with a wide range of photonic applications.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Center for Integrated Nanotechnologies

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); US Air Force Office of Scientific Research (AFOSR); USDOD; US Department of the Navy, Office of Naval Research (ONR); USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: NA0003525

OSTI ID:: 2349191

Report Number(s):: SAND--2024-05809J

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 18 Vol. 124; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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