A dust particle immersed in a glow-discharge plasma has long been known to have a charge that is negative , while the plasma is powered. However, in the afterglow, following the stopping of the plasma power, a large positive charge can collect on the particle, as was shown recently for particles in a cathodic sheath. While that outcome of positive charging in the afterglow may be common, an experimental discovery reported here reveals that the opposite outcome is also possible: a particle can develop a negative charge in the afterglow, if the plasma had previously been operated with a modulated power. Before stopping the plasma power off altogether, in a run with power modulated at a low duty cycle of 4.5 , the particle’s residual charge was negative, but it was positive in a control run without modulation. This result points to a way of controlling the charge of dust particles in a decaying plasma, which can be useful for mitigating defects in semiconductor manufacturing.
Chaubey, Neeraj and Goree, J.. "Controlling the charge of dust particles in an afterglow by modulating the plasma power." Journal of Physics. D, Applied Physics, vol. 57, no. 20, Feb. 2024. https://doi.org/10.1088/1361-6463/ad291c
Chaubey, Neeraj, & Goree, J. (2024). Controlling the charge of dust particles in an afterglow by modulating the plasma power. Journal of Physics. D, Applied Physics, 57(20). https://doi.org/10.1088/1361-6463/ad291c
Chaubey, Neeraj, and Goree, J., "Controlling the charge of dust particles in an afterglow by modulating the plasma power," Journal of Physics. D, Applied Physics 57, no. 20 (2024), https://doi.org/10.1088/1361-6463/ad291c
@article{osti_2310394,
author = {Chaubey, Neeraj and Goree, J.},
title = {Controlling the charge of dust particles in an afterglow by modulating the plasma power},
annote = {Abstract A dust particle immersed in a glow-discharge plasma has long been known to have a charge that is negative , while the plasma is powered. However, in the afterglow, following the stopping of the plasma power, a large positive charge can collect on the particle, as was shown recently for particles in a cathodic sheath. While that outcome of positive charging in the afterglow may be common, an experimental discovery reported here reveals that the opposite outcome is also possible: a particle can develop a negative charge in the afterglow, if the plasma had previously been operated with a modulated power. Before stopping the plasma power off altogether, in a run with power modulated at a low duty cycle of 4.5 % , the particle’s residual charge was negative, but it was positive in a control run without modulation. This result points to a way of controlling the charge of dust particles in a decaying plasma, which can be useful for mitigating defects in semiconductor manufacturing. },
doi = {10.1088/1361-6463/ad291c},
url = {https://www.osti.gov/biblio/2310394},
journal = {Journal of Physics. D, Applied Physics},
issn = {ISSN 0022-3727},
number = {20},
volume = {57},
place = {United Kingdom},
publisher = {IOP Publishing},
year = {2024},
month = {02}}
INTERNATIONAL CONFERENCE FOR SCIENCE EDUCATORS AND TEACHERS (ISET) 2017: Proceedings of the 5th International Conference for Science Educators and Teachers (ISET) 2017, AIP Conference Proceedingshttps://doi.org/10.1063/1.5020409