Diamond-like hydrogenated amorphous carbon prepared using saddle-field glow-discharge decomposition of methane

Conference · Sun Dec 31 00:00:00 EST 1995

OSTI ID:230148

Gaspari, F; Chan, W C.W.; Lim, P K ^[1]

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1. Univ. of Toronto, Ontario (Canada); and others

Diamond-like hydrogenated carbon films were deposited using saddle-field glow-discharge in pure methane. XPS, XAES, Raman and x-ray spectroscopy suggest that the percentage of sp{sup 3}/sp{sup 2} bonding was varied over a relatively wide range by adjusting pressure and substrate bias. It was found that a very high percentage of sp{sup 3} bonding could be achieved.

• OSTI ID: 230148
• Report Number(s): CONF-950840-; TRN: 96:000433-0148
• Resource Relation: Conference: International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of Applications of diamond films and related materials: Third international conference; Feldman, A.; Yarbrough, W.A.; Murakawa, Masao; Tzeng, Yonhua; Yoshikawa, Masanori [eds.]; PB: 973 p.
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
66 PHYSICS
DIAMONDS
DEPOSITION
FILMS
METHANE
X-RAY SPECTROSCOPY
ELECTRONIC STRUCTURE
RAMAN SPECTRA