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U.S. Department of Energy
Office of Scientific and Technical Information

Epitaxial growth of B-doped high quality diamond film on cBN surface by chemical vapor deposition

Conference ·
OSTI ID:230101
; ;  [1]
  1. Jilin Univ., Changchun (China); and others

B-doped high quality diamond epitaxial films have been obtained on high-pressure synthesized cBN crystals by dc glow discharge chemical vapor deposition (CVD). The deposition conditions and the orientation of cBN crystal are important to diamond oriented nucleation and epitaxial growth. The micro-Raman spectroscopy measurement indicates that the quality of the diamond film grown on cBN (100) surface is close to that of natural diamond. The scanning electron microscopy (SEM) observation shows that the epitaxial film has very smooth surface. The specific resistance of the B-doped epitaxial film is about 0.1 ohm{center_dot}cm.

OSTI ID:
230101
Report Number(s):
CONF-950840--
Country of Publication:
United States
Language:
English