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Correction of the Reverse Recovery Characteristics of High-Voltage 4H-SiC Junction Diodes Using Proton Irradiation

Journal Article · · Semiconductors
The effect of proton irradiation on the electrical characteristics of high-voltage (3 kV) 4H-SiC junction diodes is studied. The diodes are irradiated through a 10-μm-thick Ni mask. The proton energy and the irradiation dose are 2.8 MeV and 4 × 10{sup 11} cm{sup –2}, respectively. After irradiation, the forward differential resistance of the diodes increased by ~35%, the reverse-recovery charge decreased by a factor of ~3, and the nature of the reverse recovery became “hard.”.
OSTI ID:
22944986
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 6 Vol. 53; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English

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