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Raman Scattering in AlN Crystals Grown by Sublimation on SiC and AlN Seeds

Journal Article · · Semiconductors
The Raman-scattering technique is used to analyze the structural quality of bulk AlN crystals grown by sublimation on SiC and AlN seeds. Growth on SiC seeds is conducted with retention of the SiC seed during growth (type 1) and with total evaporation of the SiC seed (type 2). Growth on AlN seeds is conducted in tungsten containers with no graphite parts (type 3). According to the analysis of Raman spectra, the highest quality is inherent in type-3 crystals that exhibit minimal full widths at half maximum of Raman lines. The experimentally observed specific features are defined by differences in the mechanism of growth and by the content of dopant impurities in the crystals grown.
OSTI ID:
22944757
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 11 Vol. 53; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English

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