Determination of film thicknesses of metal oxides prepared by atomic layer deposition on SBA-15

Wang, Ching-Yu; Ferko, Benjamin T.; Shen, Kai; Winey, Karen I.; Vohs, John M.; Gorte, Raymond J.

doi:10.1016/j.micromeso.2023.112945

Determination of film thicknesses of metal oxides prepared by atomic layer deposition on SBA-15

Journal Article · Thu Dec 14 00:00:00 EST 2023 · Microporous and Mesoporous Materials

DOI:https://doi.org/10.1016/j.micromeso.2023.112945· OSTI ID:2294172

Wang, Ching-Yu ^[1]; ^[2]; ^[2]; Winey, Karen I. ^[2]; ^[2]; ^[2]

University of Pennsylvania, Philadelphia, PA (United States); University of Pennsylvania
University of Pennsylvania, Philadelphia, PA (United States)

ZrO₂ and CeO₂ films were grown in SBA-15 by Atomic Layer Deposition (ALD) to loadings of 0.92 g oxide/g SBA-15. Scanning Transmission Electron Microscopy (STEM) with Energy Dispersive Spectra (EDS) showed that the oxides grew uniformly inside the mesopores. Film thicknesses were then analyzed as a function of the number of ALD cycles using three methods: 1) mass changes assuming bulk densities for the films; 2) changes in pore size from Barret-Joyner-Halenda (BJH) analysis with N₂ adsorption isotherms; and 3) small-angle X-ray scattering (SAXS). Film thicknesses assuming bulk densities were between 6 and 8 times smaller than those obtained from BJH analysis. SAXS analysis gave film thicknesses that were approximately twice that obtained from bulk densities. Here, possible explanations of the discrepancies between these methods are discussed.

View Accepted Manuscript (DOE)

Research Organization:: University of Pennsylvania, Philadelphia, PA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Chemical Sciences, Geosciences & Biosciences Division (CSGB)

Grant/Contract Number:: SC0022238

OSTI ID:: 2294172

Journal Information:: Microporous and Mesoporous Materials, Journal Name: Microporous and Mesoporous Materials Vol. 366; ISSN 1387-1811

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

References (28)

Growth Per Cycle in Atomic Layer Deposition: Real Application Examplesof a Theoretical Model Puurunen, R. L. Chemical Vapor Deposition, Vol. 9, Issue 6 https://doi.org/10.1002/cvde.200306266	journal	December 2003
A Grand Canonical Monte Carlo Study of Adsorption and Capillary Phenomena in Nanopores of Various Morphologies and Topologies: Testing the BET and BJH Characterization Methods Coasne, Benoit; Gubbins, Keith E.; Pellenq, Roland J. ‐M. Particle & Particle Systems Characterization, Vol. 21, Issue 2 https://doi.org/10.1002/ppsc.200400928	journal	August 2004
A Study of Support Effects for CH4 and CO Oxidation over Pd Catalysts on ALD-Modified Al2O3 Mao, Xinyu; Foucher, Alexandre; Stach, Eric A. Catalysis Letters, Vol. 149, Issue 4 https://doi.org/10.1007/s10562-019-02699-6	journal	February 2019
Catalytic and acidic properties of silica-alumina prepared by chemical vapour deposition Sato, Satoshi; Toita, Masato; Sodesawa, Toshiaki Applied Catalysis, Vol. 62, Issue 1 https://doi.org/10.1016/S0166-9834(00)82238-1	journal	June 1990
Advanced synthesis strategies of mesoporous SBA-15 supported catalysts for catalytic reforming applications: A state-of-the-art review Singh, Sharanjit; Kumar, Ravinder; Setiabudi, Herma Dina Applied Catalysis A: General, Vol. 559 https://doi.org/10.1016/j.apcata.2018.04.015	journal	June 2018
High-surface-area ceria prepared by ALD on Al2O3 support Onn, Tzia Ming; Zhang, Shuyi; Arroyo-Ramirez, Lisandra Applied Catalysis B: Environmental, Vol. 201 https://doi.org/10.1016/j.apcatb.2016.08.054	journal	February 2017
Hydrogenolysis of n-eicosane over Ru-based catalysts in a continuous flow reactor Lee, Siwon; Shen, Kai; Wang, Ching-Yu Chemical Engineering Journal, Vol. 456 https://doi.org/10.1016/j.cej.2022.141030	journal	January 2023
Understanding polymer-porous solid interactions based on small gas molecule adsorption behavior Ren, Tian; Wang, Ching-Yu; Huang, Renjing Chemical Engineering Journal, Vol. 473 https://doi.org/10.1016/j.cej.2023.145220	journal	October 2023
Synthesis, characterization, and catalytic function of novel highly dispersed tungsten oxide catalysts on mesoporous silica Herrera, J.; Kwak, J.; Hu, J. Journal of Catalysis, Vol. 239, Issue 1 https://doi.org/10.1016/j.jcat.2006.01.034	journal	April 2006
Introducing a self-consistent test and the corresponding modification in the Barrett, Joyner and Halenda method for pore-size determination Villarroel-Rocha, Jhonny; Barrera, Deicy; Sapag, Karim Microporous and Mesoporous Materials, Vol. 200 https://doi.org/10.1016/j.micromeso.2014.08.017	journal	December 2014
Synthesis of high-surface area tungstated zirconia by atomic layer deposition on mesoporous silica Wang, Ching-Yu; Kwon, Ohhun; Gorte, Raymond J. Microporous and Mesoporous Materials, Vol. 335 https://doi.org/10.1016/j.micromeso.2022.111821	journal	April 2022
Design and Properties of Confined Nanocatalysts by Atomic Layer Deposition Gao, Zhe; Qin, Yong Accounts of Chemical Research, Vol. 50, Issue 9 https://doi.org/10.1021/acs.accounts.7b00266	journal	August 2017
Thermodynamic and Structural Properties of Bulk and Thin-Film CeVO₄ and LaVO₄ Shen, Kai; Chang, Jian; Rai, Rajeev Kumar The Journal of Physical Chemistry C, Vol. 127, Issue 31 https://doi.org/10.1021/acs.jpcc.3c03240	journal	July 2023
Redox Properties of TiO₂ Thin Films Grown on Mesoporous Silica by Atomic Layer Deposition Ke, Wang; Qin, Xiangdong; Palomino, Robert M. The Journal of Physical Chemistry Letters, Vol. 14, Issue 20 https://doi.org/10.1021/acs.jpclett.3c00834	journal	May 2023
Nucleation and Initial Stages of Growth during the Atomic Layer Deposition of Titanium Oxide on Mesoporous Silica Ke, Wang; Liu, Yang; Wang, Xuelong Nano Letters, Vol. 20, Issue 9 https://doi.org/10.1021/acs.nanolett.0c02990	journal	August 2020
Hydrodeoxygenation of m-Cresol over WO_x-Pt/SBA-15 Using Alkanes as Hydrogen Carriers Wang, Ching-Yu; Ra, Junsung; Shen, Kai ACS Catalysis, Vol. 13, Issue 16 https://doi.org/10.1021/acscatal.3c01636	journal	August 2023
Improved Thermal Stability and Methane-Oxidation Activity of Pd/Al ₂ O ₃ Catalysts by Atomic Layer Deposition of ZrO ₂ Onn, Tzia Ming; Zhang, Shuyi; Arroyo-Ramirez, Lisandra ACS Catalysis, Vol. 5, Issue 10 https://doi.org/10.1021/acscatal.5b01348	journal	August 2015
Synthesis of Highly Ordered Hydrothermally Stable Mesoporous Niobia Catalysts by Atomic Layer Deposition Pagán-Torres, Yomaira J.; Gallo, Jean Marcel R.; Wang, Dong ACS Catalysis, Vol. 1, Issue 10 https://doi.org/10.1021/cs200367t	journal	August 2011
Pore Size Determination in Ordered Mesoporous Materials Using Powder X-ray Diffraction Ishii, Yosuke; Nishiwaki, Yoshiki; Al-zubaidi, Ayar The Journal of Physical Chemistry C, Vol. 117, Issue 35 https://doi.org/10.1021/jp4057362	journal	August 2013
Mesoporous TiO ₂ : Comparison of Classical Sol−Gel and Nanoparticle Based Photoelectrodes for the Water Splitting Reaction Hartmann, Pascal; Lee, Doh-Kwon; Smarsly, Bernd M. ACS Nano, Vol. 4, Issue 6 https://doi.org/10.1021/nn1004765	journal	May 2010
Size and distribution of the iron oxide nanoparticles in SBA-15 nanoporous silica via SANS study Zeleňáková, Adriana; Hrubovčák, Pavol; Kapusta, Ondrej Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-52417-w	journal	November 2019
In-plane stress development in mesoporous thin films Cop, P.; Kitano, S.; Niinuma, K. Nanoscale, Vol. 10, Issue 15 https://doi.org/10.1039/C8NR00793D	journal	January 2018
Sub-monolayer control of the growth of oxide films on mesoporous materials Weng, Zhihuan; Chen, Zhi-hui; Qin, Xiangdong Journal of Materials Chemistry A, Vol. 6, Issue 36 https://doi.org/10.1039/C8TA05431B	journal	January 2018
Functionalized mesoporous SBA-15 silica: recent trends and catalytic applications Verma, Priyanka; Kuwahara, Yasutaka; Mori, Kohsuke Nanoscale, Vol. 12, Issue 21 https://doi.org/10.1039/D0NR00732C	journal	January 2020
Mesoporous thin films: properties and applications Innocenzi, Plinio; Malfatti, Luca Chemical Society Reviews, Vol. 42, Issue 9 https://doi.org/10.1039/c3cs35377j	journal	January 2013
Triblock Copolymer Syntheses of Mesoporous Silica with Periodic 50 to 300 Angstrom Pores Zhao, Dongyuan; Feng, Jianglin; Huo, Qisheng Science, Vol. 279, Issue 5350, p. 548-552 https://doi.org/10.1126/science.279.5350.548	journal	January 1998
Preparation of SBA-15-Supported Metals by Vapor-Phase Infiltration Wang, Ching-Yu; Shen, Kai; Gorte, Raymond J. Inorganics, Vol. 10, Issue 11 https://doi.org/10.3390/inorganics10110215	journal	November 2022
Atomic Layer Deposition on Porous Materials: Problems with Conventional Approaches to Catalyst and Fuel Cell Electrode Preparation Onn, Tzia; Küngas, Rainer; Fornasiero, Paolo Inorganics, Vol. 6, Issue 1 https://doi.org/10.3390/inorganics6010034	journal	March 2018

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Related Subjects

36 MATERIALS SCIENCE
Atomic layer deposition
BJH method
Density
Mesoporous silica
N2 isotherm
Pore size distribution
Small-angle X-ray scattering
Thin film

Determination of film thicknesses of metal oxides prepared by atomic layer deposition on SBA-15

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