Multislice Electron Tomography Using Four-Dimensional Scanning Transmission Electron Microscopy

Lee, Juhyeok; Lee, Moosung; Park, YongKeun; Ophus, Colin; Yang, Yongsoo

doi:10.1103/physrevapplied.19.054062

Multislice Electron Tomography Using Four-Dimensional Scanning Transmission Electron Microscopy

Journal Article · Thu May 18 00:00:00 EDT 2023 · Physical Review Applied

DOI:https://doi.org/10.1103/physrevapplied.19.054062· OSTI ID:2282281

^[1]; ^[1]; ^[2]; ^[3]; ^[1]

Korea Advanced Inst. Science and Technology (KAIST), Daejeon (Korea, Republic of)
Korea Advanced Inst. Science and Technology (KAIST), Daejeon (Korea, Republic of); Tomocube, Inc., Daejeon (Korea, Republic of)
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy; Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). Molecular Foundry

Electron tomography offers useful three-dimensional (3D) structural information, which cannot be observed by two-dimensional imaging. By combining annular dark-field scanning transmission electron microscopy (ADF STEM) with aberration correction, the resolution of electron tomography has reached atomic resolution. However, tomography based on ADF STEM inherently suffers from several issues, including a high electron-dose requirement, poor contrast for light elements, and artifacts from image-contrast nonlinearity. Here, we develop an alternative method called multislice electron tomography (MSET) based on four-dimensional STEM tilt series. In this study, our simulations show that multislice-based 3D reconstruction can effectively reduce undesirable reconstruction artifacts from the nonlinear contrast, allowing precise determination of atomic structures with improved sensitivity for low-Z elements, at considerably low electron-dose conditions. We expect that the MSET method can be applied to a wide variety of materials, including radiation-sensitive samples and materials containing light elements whose 3D atomic structures have never been fully elucidated due to electron-dose limitations or nonlinear imaging contrast.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 2282281

Journal Information:: Physical Review Applied, Journal Name: Physical Review Applied Journal Issue: 5 Vol. 19; ISSN 2331-7019

Publisher:: American Physical Society (APS)Copyright Statement

Country of Publication:: United States

Language:: English

References (62)

Electron Tomography: A Three-Dimensional Analytic Tool for Hard and Soft Materials Research Ercius, Peter; Alaidi, Osama; Rames, Matthew J. Advanced Materials, Vol. 27, Issue 38 https://doi.org/10.1002/adma.201501015	journal	June 2015
Advanced Computing in Electron Microscopy Kirkland, Earl J. Springer Cham https://doi.org/10.1007/978-3-030-33260-0	book	January 2020
Coherence and multiple scattering in “Z-contrast” images Treacy, M. M. J.; Gibson, J. M. Ultramicroscopy, Vol. 52, Issue 1 https://doi.org/10.1016/0304-3991(93)90020-X	journal	September 1993
Conditions and reasons for incoherent imaging in STEM Hartel, P.; Rose, H.; Dinges, C. Ultramicroscopy, Vol. 63, Issue 2 https://doi.org/10.1016/0304-3991(96)00020-4	journal	June 1996
3D electron microscopy in the physical sciences: the development of Z-contrast and EFTEM tomography Midgley, P. A.; Weyland, M. Ultramicroscopy, Vol. 96, Issue 3-4 https://doi.org/10.1016/S0304-3991(03)00105-0	journal	September 2003
Thermodynamics and kinetics of ordered and disordered Cu/Au alloys from first principles calculations Pandey, Shubham; Koch, Robert J.; Li, Guangfang Journal of Alloys and Compounds, Vol. 809 https://doi.org/10.1016/j.jallcom.2019.07.327	journal	November 2019
Three-Dimensional Atomic Structure of Grain Boundaries Resolved by Atomic-Resolution Electron Tomography Wang, Chunyang; Duan, Huichao; Chen, Chunjin Matter, Vol. 3, Issue 6 https://doi.org/10.1016/j.matt.2020.09.003	journal	December 2020
An improved ptychographical phase retrieval algorithm for diffractive imaging Maiden, Andrew M.; Rodenburg, John M. Ultramicroscopy, Vol. 109, Issue 10 https://doi.org/10.1016/j.ultramic.2009.05.012	journal	September 2009
Efficient phase contrast imaging in STEM using a pixelated detector. Part 1: Experimental demonstration at atomic resolution Pennycook, Timothy J.; Lupini, Andrew R.; Yang, Hao Ultramicroscopy, Vol. 151, p. 160-167 https://doi.org/10.1016/j.ultramic.2014.09.013	journal	April 2015
A multiple scattering algorithm for three dimensional phase contrast atomic electron tomography Ren, David; Ophus, Colin; Chen, Michael Ultramicroscopy, Vol. 208 https://doi.org/10.1016/j.ultramic.2019.112860	journal	January 2020
Recording and Using 4D-STEM Datasets in Materials Science Ophus, Colin; Ercius, Peter; Sarahan, Michael Microscopy and Microanalysis, Vol. 20, Issue S3 https://doi.org/10.1017/S1431927614002037	journal	August 2014
Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychography and Beyond Ophus, Colin Microscopy and Microanalysis, Vol. 25, Issue 3 https://doi.org/10.1017/S1431927619000497	journal	May 2019
Direct Observation of Three-Dimensional Atomic Structure of Twinned Metallic Nanoparticles and Their Catalytic Properties Lee, Juhyeok; Jeong, Chaehwa; Lee, Taegu Nano Letters, Vol. 22, Issue 2 https://doi.org/10.1021/acs.nanolett.1c03773	journal	January 2022
Measuring Lattice Strain in Three Dimensions through Electron Microscopy Goris, Bart; De Beenhouwer, Jan; De Backer, Annick Nano Letters, Vol. 15, Issue 10 https://doi.org/10.1021/acs.nanolett.5b03008	journal	September 2015
Three-Dimensional Elemental Mapping at the Atomic Scale in Bimetallic Nanocrystals Goris, Bart; De Backer, Annick; Van Aert, Sandra Nano Letters, Vol. 13, Issue 9 https://doi.org/10.1021/nl401945b	journal	August 2013
Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy Krivanek, Ondrej L.; Chisholm, Matthew F.; Nicolosi, Valeria Nature, Vol. 464, Issue 7288 https://doi.org/10.1038/nature08879	journal	March 2010
Three-dimensional atomic imaging of crystalline nanoparticles Van Aert, Sandra; Batenburg, Kees J.; Rossell, Marta D. Nature, Vol. 470, Issue 7334 https://doi.org/10.1038/nature09741	journal	February 2011
Electron tomography at 2.4-ångström resolution Scott, M. C.; Chen, Chien-Chun; Mecklenburg, Matthew Nature, Vol. 483, Issue 7390 https://doi.org/10.1038/nature10934	journal	March 2012
Three-dimensional imaging of dislocations in a nanoparticle at atomic resolution Chen, Chien-Chun; Zhu, Chun; White, Edward R. Nature, Vol. 496, Issue 7443 https://doi.org/10.1038/nature12009	journal	March 2013
Deciphering chemical order/disorder and material properties at the single-atom level Yang, Yongsoo; Chen, Chien-Chun; Scott, M. C. Nature, Vol. 542, Issue 7639 https://doi.org/10.1038/nature21042	journal	February 2017
Electron tomography and holography in materials science Midgley, Paul A.; Dunin-Borkowski, Rafal E. Nature Materials, Vol. 8, Issue 4 https://doi.org/10.1038/nmat2406	journal	April 2009
Three-dimensional coordinates of individual atoms in materials revealed by electron tomography Xu, Rui; Chen, Chien-Chun; Wu, Li Nature Materials, Vol. 14, Issue 11 https://doi.org/10.1038/nmat4426	journal	September 2015
High-fidelity optical diffraction tomography of multiple scattering samples Lim, Joowon; Ayoub, Ahmed B.; Antoine, Elizabeth E. Light: Science & Applications, Vol. 8, Issue 1 https://doi.org/10.1038/s41377-019-0195-1	journal	September 2019
Electron ptychographic microscopy for three-dimensional imaging Gao, Si; Wang, Peng; Zhang, Fucai Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/s41467-017-00150-1	journal	July 2017
Single-atom level determination of 3-dimensional surface atomic structure via neural network-assisted atomic electron tomography Lee, Juhyeok; Jeong, Chaehwa; Yang, Yongsoo Nature Communications, Vol. 12, Issue 1 https://doi.org/10.1038/s41467-021-22204-1	journal	March 2021
Ion complexation waves emerge at the curved interfaces of layered minerals Whittaker, Michael L.; Ren, David; Ophus, Colin Nature Communications, Vol. 13, Issue 1 https://doi.org/10.1038/s41467-022-31004-0	journal	June 2022
Direct strain correlations at the single-atom level in three-dimensional core-shell interface structures Jo, Hyesung; Wi, Dae Han; Lee, Taegu Nature Communications, Vol. 13, Issue 1 https://doi.org/10.1038/s41467-022-33236-6	journal	October 2022
Three-dimensional atomic packing in amorphous solids with liquid-like structure Yuan, Yakun; Kim, Dennis S.; Zhou, Jihan Nature Materials, Vol. 21, Issue 1 https://doi.org/10.1038/s41563-021-01114-z	journal	October 2021
Quantitative phase imaging in biomedicine Park, YongKeun; Depeursinge, Christian; Popescu, Gabriel Nature Photonics, Vol. 12, Issue 10 https://doi.org/10.1038/s41566-018-0253-x	journal	September 2018
Electron ptychography of 2D materials to deep sub-ångström resolution Jiang, Yi; Chen, Zhen; Han, Yimo Nature, Vol. 559, Issue 7714 https://doi.org/10.1038/s41586-018-0298-5	journal	July 2018
Observing crystal nucleation in four dimensions using atomic electron tomography Zhou, Jihan; Yang, Yongsoo; Yang, Yao Nature, Vol. 570, Issue 7762 https://doi.org/10.1038/s41586-019-1317-x	journal	June 2019
Determining the three-dimensional atomic structure of an amorphous solid Yang, Yao; Zhou, Jihan; Zhu, Fan Nature, Vol. 592, Issue 7852 https://doi.org/10.1038/s41586-021-03354-0	journal	March 2021
Metastable hexagonal close-packed palladium hydride in liquid cell TEM Hong, Jaeyoung; Bae, Jee-Hwan; Jo, Hyesung Nature, Vol. 603, Issue 7902 https://doi.org/10.1038/s41586-021-04391-5	journal	March 2022
GENFIRE: A generalized Fourier iterative reconstruction algorithm for high-resolution 3D imaging Pryor, Alan; Yang, Yongsoo; Rana, Arjun Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/s41598-017-09847-1	journal	September 2017
Multi-slice ptychographic tomography Li, Peng; Maiden, Andrew Scientific Reports, Vol. 8, Issue 1 https://doi.org/10.1038/s41598-018-20530-x	journal	February 2018
Accurate real space iterative reconstruction (RESIRE) algorithm for tomography Pham, Minh; Yuan, Yakun; Rana, Arjun Scientific Reports, Vol. 13, Issue 1 https://doi.org/10.1038/s41598-023-31124-7	journal	April 2023
Mean Displacement of Surface Atoms in Palladium and Lead Single Crystals Goodman, R. M.; Farrell, H. H.; Somorjai, G. A. The Journal of Chemical Physics, Vol. 48, Issue 3 https://doi.org/10.1063/1.1668759	journal	February 1968
Vibrational amplitudes and Debye-Waller factors from elastic constants and Raman frequencies Hewat, A. W. Journal of Physics C: Solid State Physics, Vol. 5, Issue 12 https://doi.org/10.1088/0022-3719/5/12/011	journal	June 1972
Maximum-likelihood refinement for coherent diffractive imaging Thibault, P.; Guizar-Sicairos, M. New Journal of Physics, Vol. 14, Issue 6 https://doi.org/10.1088/1367-2630/14/6/063004	journal	June 2012
X-Ray Lattice Constant of Barium Oxide Zollweg, Robert J. Physical Review, Vol. 100, Issue 2 https://doi.org/10.1103/PhysRev.100.671	journal	October 1955
Ptychographic atomic electron tomography: Towards three-dimensional imaging of individual light atoms in materials Chang, Dillan J.; Kim, Dennis S.; Rana, Arjun Physical Review B, Vol. 102, Issue 17 https://doi.org/10.1103/PhysRevB.102.174101	journal	November 2020
Theoretical x-ray absorption Debye-Waller factors Vila, Fernando D.; Rehr, J. J.; Rossner, H. H. Physical Review B, Vol. 76, Issue 1 https://doi.org/10.1103/PhysRevB.76.014301	journal	July 2007
General framework for quantitative three-dimensional reconstruction from arbitrary detection geometries in TEM Van den Broek, Wouter; Koch, Christoph T. Physical Review B, Vol. 87, Issue 18 https://doi.org/10.1103/PhysRevB.87.184108	journal	May 2013
Method for Retrieval of the Three-Dimensional Object Potential by Inversion of Dynamical Electron Scattering Van den Broek, Wouter; Koch, Christoph T. Physical Review Letters, Vol. 109, Issue 24 https://doi.org/10.1103/PhysRevLett.109.245502	journal	December 2012
The scattering of electrons by atoms and crystals. I. A new theoretical approach Cowley, J. M.; Moodie, A. F. Acta Crystallographica, Vol. 10, Issue 10, p. 609-619 https://doi.org/10.1107/S0365110X57002194	journal	October 1957
Beugung im inhomogenen Primärstrahlwellenfeld. I. Prinzip einer Phasenmessung von Elektronenbeungungsinterferenzen Hoppe, W. Acta Crystallographica Section A, Vol. 25, Issue 4 https://doi.org/10.1107/S0567739469001045	journal	July 1969
On the shape of a set of points in the plane Edelsbrunner, H.; Kirkpatrick, D.; Seidel, R. IEEE Transactions on Information Theory, Vol. 29, Issue 4 https://doi.org/10.1109/TIT.1983.1056714	journal	July 1983
A Threshold Selection Method from Gray-Level Histograms Otsu, Nobuyuki IEEE Transactions on Systems, Man, and Cybernetics, Vol. 9, Issue 1 https://doi.org/10.1109/TSMC.1979.4310076	journal	January 1979
Embedded Nanostructures Revealed in Three Dimensions Arslan, I. Science, Vol. 309, Issue 5744 https://doi.org/10.1126/science.1116745	journal	September 2005
3D structure of individual nanocrystals in solution by electron microscopy Park, J.; Elmlund, H.; Ercius, P. Science, Vol. 349, Issue 6245 https://doi.org/10.1126/science.aab1343	journal	July 2015
Atomic electron tomography: 3D structures without crystals Miao, J.; Ercius, P.; Billinge, S. J. L. Science, Vol. 353, Issue 6306 https://doi.org/10.1126/science.aaf2157	journal	September 2016
Critical differences in 3D atomic structure of individual ligand-protected nanocrystals in solution Kim, Byung Hyo; Heo, Junyoung; Kim, Sungin Science, Vol. 368, Issue 6486 https://doi.org/10.1126/science.aax3233	journal	April 2020
Electron ptychography achieves atomic-resolution limits set by lattice vibrations Chen, Zhen; Jiang, Yi; Shao, Yu-Tsun Science, Vol. 372, Issue 6544 https://doi.org/10.1126/science.abg2533	journal	May 2021
Ptychographic transmission microscopy in three dimensions using a multi-slice approach Maiden, A. M.; Humphry, M. J.; Rodenburg, J. M. Journal of the Optical Society of America A, Vol. 29, Issue 8 https://doi.org/10.1364/JOSAA.29.001606	journal	January 2012
Experimental robustness of Fourier ptychography phase retrieval algorithms Yeh, Li-Hao; Dong, Jonathan; Zhong, Jingshan Optics Express, Vol. 23, Issue 26 https://doi.org/10.1364/OE.23.033214	journal	January 2015
Inverse dynamical photon scattering (IDPS): an artificial neural network based algorithm for three-dimensional quantitative imaging in optical microscopy Jiang, Xiaoming; Van den Broek, Wouter; Koch, Christoph T. Optics Express, Vol. 24, Issue 7 https://doi.org/10.1364/OE.24.007006	journal	January 2016
X-ray ptychography with extended depth of field Tsai, Esther H. R.; Usov, Ivan; Diaz, Ana Optics Express, Vol. 24, Issue 25 https://doi.org/10.1364/OE.24.029089	journal	January 2016
Learning approach to optical tomography Kamilov, Ulugbek S.; Papadopoulos, Ioannis N.; Shoreh, Morteza H. Optica, Vol. 2, Issue 6 https://doi.org/10.1364/OPTICA.2.000517	journal	January 2015
Further improvements to the ptychographical iterative engine Maiden, Andrew; Johnson, Daniel; Li, Peng Optica, Vol. 4, Issue 7 https://doi.org/10.1364/OPTICA.4.000736	journal	January 2017
Inverse problem solver for multiple light scattering using modified Born series Lee, Moosung; Hugonnet, Hervé; Park, YongKeun Optica, Vol. 9, Issue 2 https://doi.org/10.1364/OPTICA.446511	journal	February 2022
Influence of Electron Noise on Three-dimensional Image Reconstruction Hegerl, R.; Hoppe, W. Zeitschrift für Naturforschung A, Vol. 31, Issue 12 https://doi.org/10.1515/zna-1976-1241	journal	December 1976
Atomic electron tomography in three and four dimensions Zhou, Jihan; Yang, Yongsoo; Ercius, Peter MRS Bulletin, Vol. 45, Issue 4 https://doi.org/10.1557/mrs.2020.88	journal	April 2020

Similar Records

Uncovering the three-dimensional structure of upconverting core–shell nanoparticles with multislice electron ptychography

Journal Article · Wed Jun 12 20:00:00 EDT 2024 · Applied Physics Letters · OSTI ID:2397256

Atomic bonding effects in annular dark field scanning transmission electron microscopy. I. Computational predictions

Journal Article · Fri Jul 15 00:00:00 EDT 2016 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:22592862

Ptychographic atomic electron tomography: Towards three-dimensional imaging of individual light atoms in materials

Journal Article · Sun Nov 01 19:00:00 EST 2020 · Physical Review B · OSTI ID:1756392

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
Schroedinger equation
annular dark-field imaging
electron beams & optics
nanostructures
scanning transmission electron microscopy
structural properties
tomography

Multislice Electron Tomography Using Four-Dimensional Scanning Transmission Electron Microscopy

Citation Formats

References (62)

Similar Records

Related Subjects