Fabrication of thin diamond membranes by Ne + implantation

Basso, Luca; Titze, Michael; Henshaw, Jacob; Kehayias, Pauli; Cong, Rong; Ziabari, Maziar Saleh; Lu, Tzu-Ming; Lilly, Michael P.; Mounce, Andrew M.

doi:10.1016/j.giant.2024.100238

Fabrication of thin diamond membranes by ${Ne}^{+}$ implantation

Journal Article · Thu Feb 29 23:00:00 EST 2024 · Giant

DOI:https://doi.org/10.1016/j.giant.2024.100238· OSTI ID:2280745

; Titze, Michael; Henshaw, Jacob; Kehayias, Pauli; Cong, Rong; Ziabari, Maziar Saleh; Lu, Tzu-Ming; Lilly, Michael P.; Mounce, Andrew M.

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Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: NA0003525

OSTI ID:: 2280745

Alternate ID(s):: OSTI ID: 2317745

Journal Information:: Giant, Journal Name: Giant Journal Issue: C Vol. 17; ISSN 2666-5425

Publisher:: ElsevierCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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