Phase Formation and Electronic Structure Peculiarities in the Al{sub 1–} {sub x}Si{sub x} Film Composites under the Conditions of Magnetron and Ion-Beam Sputtering

Journal Article · Tue May 15 00:00:00 EDT 2018 · Physics of the Solid State

DOI:https://doi.org/10.1134/S1063783418050311· OSTI ID:22771101

Usol’tseva, D. S.; Serbin, O. V.; Zanin, I. E.; Kulikova, T. V.; Nesterov, D. N.; Barkov, K. A.; Sitnikov, A. V.; Lazaruk, S. K.; Domashevskaya, E. P. ^[1]

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1. Voronezh State University (Russian Federation)

The peculiarities of the phase composition and electronic structure of aluminum–silicon composite films near the Al{sub 0.75}Si{sub 0.25} composition obtained by the magnetron and ion-beam sputtering methods on a Si(100) silicon substrate are studied using the X-ray diffraction techniques and ultrasoft X-ray emission spectroscopy. In addition to silicon nanocrystals of about 25 nm in size, an ordered solid solution corresponding to the previously unknown Al{sub 3}Si phase is formed in magnetron sputtering on a polycrystalline Al matrix. Films obtained by ion-beam sputtering of the composite target are found to be monophasic and contained only one phase of an ordered solid solution of aluminum silicide Al{sub 3}Si of the Pm3m cubic system with the primitive cell parameter a = 4.085 Å. However, subsequent pulsed photon annealing of the composite with different radiation doses from 145 to 216 J/cm{sup 2} gives rise to the partial decomposition of the Al{sub 3}Si phase with the formation of free metallic aluminum and silicon nanocrystals with sizes in the range from 50 to 100 nm, depending on the pulsed photon radiation dose.

• OSTI ID: 22771101
• Journal Information: Physics of the Solid State, Vol. 60, Issue 5; Other Information: Copyright (c) 2018 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7834
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM COMPOUNDS
ALUMINIUM SILICIDES
ANNEALING
CUBIC LATTICES
ELECTRONIC STRUCTURE
FILMS
ION BEAMS
MAGNETRONS
NANOSTRUCTURES
PHOTONS
POLYCRYSTALS
PULSES
SILICON COMPOUNDS
SOLID SOLUTIONS
SPUTTERING
SUBSTRATES
X-RAY DIFFRACTION
X-RAY EMISSION SPECTROSCOPY