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Title: Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source

Abstract

The measured dependences of the equivalent plasma resistance on the external magnetic field (0–50 G) in a 46-cm-diameter RF inductive plasma source operating at frequencies of 2, 4, and 13.56 MHz and a power of 100–500 W are presented. The experiments were carried out in argon at pressures of 0.1–30 mTorr. The presence of the external magnetic field leads to the appearance of resonance domains of efficient RF power absorption corresponding to the conditions of resonance excitation of helicons coupled with Trivelpiece–Gould modes. It is shown that RF power absorption at frequencies of 2 MHz can be optimized by applying an external magnetic field corresponding to the domains of resonance absorption. The effect is enhanced with increasing operating frequency.

Authors:
; ;  [1]
  1. Moscow State University, Department of Physics (Russian Federation)
Publication Date:
OSTI Identifier:
22763224
Resource Type:
Journal Article
Journal Name:
Plasma Physics Reports
Additional Journal Information:
Journal Volume: 44; Journal Issue: 9; Other Information: Copyright (c) 2018 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-780X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; EFFICIENCY; EXCITATION; MAGNETIC FIELDS; MHZ RANGE 01-100; PLASMA; RESONANCE; RESONANCE ABSORPTION

Citation Formats

Nekliudova, P. A., E-mail: nekludova-pa@mail.ru, Kralkina, E. A., E-mail: ekralkina@mail.ru, Vavilin, K. V., Zadiriyev, I. I., and Nikonov, A. M. Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source. United States: N. p., 2018. Web. doi:10.1134/S1063780X18090088.
Nekliudova, P. A., E-mail: nekludova-pa@mail.ru, Kralkina, E. A., E-mail: ekralkina@mail.ru, Vavilin, K. V., Zadiriyev, I. I., & Nikonov, A. M. Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source. United States. doi:10.1134/S1063780X18090088.
Nekliudova, P. A., E-mail: nekludova-pa@mail.ru, Kralkina, E. A., E-mail: ekralkina@mail.ru, Vavilin, K. V., Zadiriyev, I. I., and Nikonov, A. M. Sat . "Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source". United States. doi:10.1134/S1063780X18090088.
@article{osti_22763224,
title = {Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source},
author = {Nekliudova, P. A., E-mail: nekludova-pa@mail.ru and Kralkina, E. A., E-mail: ekralkina@mail.ru and Vavilin, K. V. and Zadiriyev, I. I. and Nikonov, A. M.},
abstractNote = {The measured dependences of the equivalent plasma resistance on the external magnetic field (0–50 G) in a 46-cm-diameter RF inductive plasma source operating at frequencies of 2, 4, and 13.56 MHz and a power of 100–500 W are presented. The experiments were carried out in argon at pressures of 0.1–30 mTorr. The presence of the external magnetic field leads to the appearance of resonance domains of efficient RF power absorption corresponding to the conditions of resonance excitation of helicons coupled with Trivelpiece–Gould modes. It is shown that RF power absorption at frequencies of 2 MHz can be optimized by applying an external magnetic field corresponding to the domains of resonance absorption. The effect is enhanced with increasing operating frequency.},
doi = {10.1134/S1063780X18090088},
journal = {Plasma Physics Reports},
issn = {1063-780X},
number = 9,
volume = 44,
place = {United States},
year = {2018},
month = {9}
}