Ridge Waveguide Structure for Lattice-Matched Quantum Cascade Lasers
- Ioffe Institute (Russian Federation)
The fabrication and investigation of the ridge waveguide structure for a quantum cascade laser on an indium phosphide substrate intended for a wavelength of 4.8 μm, which corresponds to one of the atmospheric transparency windows, is calculated. The heterostructure is grown by molecular-beam epitaxy and consists of 30 cascades. Post-growth treatment is performed by photolithography using Russian equipment. The fabricated ridge waveguide structure allowed lasing to be attained at the required wavelength at room temperature.
- OSTI ID:
- 22749702
- Journal Information:
- Semiconductors, Journal Name: Semiconductors Journal Issue: 12 Vol. 52; ISSN SMICES; ISSN 1063-7826
- Country of Publication:
- United States
- Language:
- English
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