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Title: Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode

Abstract

Generation of plasma in a pulsed non-self-sustained glow discharge with a hollow cathode with an area of ≥2 m{sup 2} at gas pressures of 0.4–1 Pa was studied experimentally. At an auxiliary arc-discharge current of 100 A and a main discharge voltage of 240 V, a pulse-periodic glow discharge with a current amplitude of 370 A, pulse duration of 340 μs, and repetition rate of 1 kHz was obtained. The possibility of creating a uniform gas-discharge plasma with a density of up to 10{sup 12} cm{sup −3} and an electron temperature of 1 eV in a volume of >0.2 m{sup 3} was demonstrated. Such plasma can be efficiently used to treat material surfaces and generate pulsed ion beams with a current density of up to 15 mA/cm{sup 2}.

Authors:
; ; ; ; ; ;  [1]
  1. Russian Academy of Sciences, Institute of High-Current Electronics, Siberian Branch (Russian Federation)
Publication Date:
OSTI Identifier:
22614055
Resource Type:
Journal Article
Resource Relation:
Journal Name: Plasma Physics Reports; Journal Volume: 43; Journal Issue: 1; Other Information: Copyright (c) 2017 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COLD PLASMA; CURRENT DENSITY; ELECTRIC POTENTIAL; ELECTRON TEMPERATURE; GLOW DISCHARGES; HOLLOW CATHODES; ION BEAMS; KHZ RANGE; PRESSURE RANGE PA; PULSES

Citation Formats

Akhmadeev, Yu. H., Denisov, V. V., E-mail: volodyadenisov@yandex.ru, Koval, N. N., Kovalsky, S. S., Lopatin, I. V., Schanin, P. M., and Yakovlev, V. V. Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode. United States: N. p., 2017. Web. doi:10.1134/S1063780X17010020.
Akhmadeev, Yu. H., Denisov, V. V., E-mail: volodyadenisov@yandex.ru, Koval, N. N., Kovalsky, S. S., Lopatin, I. V., Schanin, P. M., & Yakovlev, V. V. Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode. United States. doi:10.1134/S1063780X17010020.
Akhmadeev, Yu. H., Denisov, V. V., E-mail: volodyadenisov@yandex.ru, Koval, N. N., Kovalsky, S. S., Lopatin, I. V., Schanin, P. M., and Yakovlev, V. V. Sun . "Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode". United States. doi:10.1134/S1063780X17010020.
@article{osti_22614055,
title = {Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode},
author = {Akhmadeev, Yu. H. and Denisov, V. V., E-mail: volodyadenisov@yandex.ru and Koval, N. N. and Kovalsky, S. S. and Lopatin, I. V. and Schanin, P. M. and Yakovlev, V. V.},
abstractNote = {Generation of plasma in a pulsed non-self-sustained glow discharge with a hollow cathode with an area of ≥2 m{sup 2} at gas pressures of 0.4–1 Pa was studied experimentally. At an auxiliary arc-discharge current of 100 A and a main discharge voltage of 240 V, a pulse-periodic glow discharge with a current amplitude of 370 A, pulse duration of 340 μs, and repetition rate of 1 kHz was obtained. The possibility of creating a uniform gas-discharge plasma with a density of up to 10{sup 12} cm{sup −3} and an electron temperature of 1 eV in a volume of >0.2 m{sup 3} was demonstrated. Such plasma can be efficiently used to treat material surfaces and generate pulsed ion beams with a current density of up to 15 mA/cm{sup 2}.},
doi = {10.1134/S1063780X17010020},
journal = {Plasma Physics Reports},
number = 1,
volume = 43,
place = {United States},
year = {Sun Jan 15 00:00:00 EST 2017},
month = {Sun Jan 15 00:00:00 EST 2017}
}