Structural, morphological and optical properties of CeO{sub 2} thin films deposited by RF sputtering

Journal Article · Mon May 23 00:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4947907· OSTI ID:22608682

Murugan, R.; Vijayaprasath, G.; Sakthivel, P.; Mahalingam, T. ^[1]

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1. Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749 (Korea, Republic of)

Cerium oxide (CeO{sub 2}) thin films were deposited on glass substrates by sputtering at various substrate temperatures. CeO{sub 2} films were characterized by X-ray diffraction, FESEM, PL and Raman analyses. X-ray diffraction patterns of films reveal fcc cubic structure with preferential orientation along (2 2 0) crystallographic plane. SEM images show that the particles are uniformly distributed on the film surface. The films were found to be well adheared to the substrates and pin holes are not observed on the surface of the films. PL spectra exhibits a strong near band-gap-edge emission and a broad blue, green luminescence, which can be assigned to the presence of Ce and O vacancies, amorphous phases, deep level impurities and structural defects. The relative intensity between the different peaks of the bands related to defects or impurities was studied as a tool for quality control of the films. Moreover, vibrational measurements through Raman analysis were carried out and the results are discussed.

• OSTI ID: 22608682
• Journal Information: AIP Conference Proceedings, Vol. 1731, Issue 1; Conference: DAE solid state physics symposium 2015, Uttar Pradesh (India), 21-25 Dec 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AMORPHOUS STATE
CERIUM OXIDES
CRYSTAL STRUCTURE
CRYSTALLOGRAPHY
DEFECTS
FCC LATTICES
GLASS
IMPURITIES
LUMINESCENCE
OPTICAL PROPERTIES
PHOTOLUMINESCENCE
RAMAN EFFECT
SCANNING ELECTRON MICROSCOPY
SPECTRA
SUBSTRATES
SURFACES
THIN FILMS
VACANCIES
X-RAY DIFFRACTION