Survey and adjustment methods applied on an 11 axes high performance reflectometer for synchrotron radiation

Journal Article · Wed Jul 27 04:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4952848· OSTI ID:22608361

Bischoff, P.; Schäfers, F.; Schroeter, T.; Senf, F.; Sokolov, A.; Zeschke, T.; Erko, A. ^[1]

---

1. Helmholtz-Zentrum Berlin, Albert-Einstein-Str. 15, Berlin, Germany, D-12489 (Germany)

At BESSY-II a new UV-and XUV optics beamline [1] has recently been setup with an in-house developed versatile reflectometer [2], [3], [4] for at-wavelength metrology on reflective and diffractive optical elements up to 4 kg mass. High precision measurements of the reflection and polarization properties are feasible by a 360° azimuthal rotation of the sample around the beam of light, where samples can be adjusted reproducibly with a novel UHV-Tripod within arc sec and μm precision. The azimuthal rotation requires an extremely high precision adjustment of the goniometer axis with respect to the incident light beam. Here we describe sophisticated methods with which we achieve nearly perfect agreement of the azimuthal rotation axis and the synchrotron beam in the 30 arc sec range. By using geodetic instruments (lasertracker, theodolite, autocollimator) the quality of the reflectometer UHV-mechanics has been characterized with respect to stiffness and radial run out with highest precision [5].

• OSTI ID: 22608361
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1741; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ACCURACY
BEAMS
BESSY STORAGE RING
EXTREME ULTRAVIOLET RADIATION
FLEXIBILITY
GONIOMETERS
MASS
MECHANICS
METROLOGY
PERFORMANCE
POLARIZATION
REFLECTION
ROTATION
SYNCHROTRON RADIATION
WAVELENGTHS