Is the bulk mode conversion important in high density helicon plasma?

Journal Article · Wed Jun 15 04:00:00 EDT 2016 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4951017· OSTI ID:22600152

Isayama, Shogo; Hada, Tohru ^[1]; Shinohara, Shunjiro ^[2]; Tanikawa, Takao ^[3]

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1. Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-Kohen, Kasuga, Fukuoka 816-8580 (Japan)
2. Institute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16, Naka-cho, Koganei, Tokyo 184-8588 (Japan)
3. Research Institute of Science and Technology, Tokai University 4-1-1 Kitakaname, Hiratsuka, Kanagawa 259-1292 (Japan)

In a high-density helicon plasma production process, a contribution of Trivelpiece-Gould (TG) wave for surface power deposition is widely accepted. The TG wave can be excited either due to an abrupt density gradient near the plasma edge (surface conversion) or due to linear mode conversion from the helicon wave in a density gradient in the bulk region (bulk mode conversion). By numerically solving the boundary value problem of linear coupling between the helicon and the TG waves in a background with density gradient, we show that the efficiency of the bulk mode conversion strongly depends on the dissipation included in the plasma, and the bulk mode conversion is important when the dissipation is small. Also, by performing FDTD simulation, we show the time evolution of energy flux associated with the helicon and the TG waves.

• OSTI ID: 22600152
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 6 Vol. 23; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
BOUNDARY-VALUE PROBLEMS
COMPUTERIZED SIMULATION
CONVERSION
DEPOSITION
HELICON WAVES
MODE CONVERSION
PLASMA
PLASMA DENSITY
PLASMA PRODUCTION
SURFACES