Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma
- Department of Nanoscale Semiconductor Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763 (Korea, Republic of)
- Department of Electrical Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763 (Korea, Republic of)
- Plasma Technology Research Center, National Fusion Research Institute, 169-148 Gwahak-ro, Yuseong-gu, Daejeon 34133 (Korea, Republic of)
The electron bounce resonance was experimentally investigated in a low pressure planar inductively coupled plasma. The electron energy probability functions (EEPFs) were measured at different chamber heights and the energy diffusion coefficients were calculated by the kinetic model. It is found that the EEPFs begin to flatten at the first electron bounce resonance condition, and the plateau shifts to a higher electron energy as the chamber height increases. The plateau which indicates strong electron heating corresponds not only to the electron bounce resonance condition but also to the peaks of the first component of the energy diffusion coefficients. As a result, the plateau formation in the EEPFs is mainly due to the electron bounce resonance in a finite inductive discharge.
- OSTI ID:
- 22600146
- Journal Information:
- Physics of Plasmas, Vol. 23, Issue 6; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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