Electron heating mode transition induced by mixing radio frequency and ultrahigh frequency dual frequency powers in capacitive discharges

Journal Article · Sun May 15 04:00:00 EDT 2016 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4952629· OSTI ID:22600103

Electron heating mode transitions induced by mixing the low- and high-frequency power in dual-frequency nitrogen discharges at 400 mTorr pressure are presented. As the low-frequency (13.56 MHz) power decreases and high-frequency (320 MHz) power increases for the fixed power of 200 W, there is a transition of electron energy distribution function (EEDF) from Druyvesteyn to bi-Maxwellian type characterized by a distinguished warm electron population. It is shown that this EEDF evolution is attributed to the transition from collisional to collisionless stochastic heating of the low-energy electrons.

• OSTI ID: 22600103
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 5 Vol. 23; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
DISTRIBUTION FUNCTIONS
ELECTRONS
ENERGY SPECTRA
HEATING
MHZ RANGE
MIXING
NITROGEN
RADIOWAVE RADIATION
STOCHASTIC PROCESSES