Three-dimensional simulation of microwave-induced helium plasma under atmospheric pressure
- School of Electronics and Information Engineering, Sichuan University, Chengdu 610065 (China)
A three-dimensional model is presented to investigate helium plasma generated by microwave under atmospheric pressure in this paper, which includes the physical processes of electromagnetic wave propagation, electron and heavy species transport, gas flow, and heat transfer. The model is based on the fluid approximation calculation and local thermodynamic equilibrium assumption. The simulation results demonstrate that the maxima of the electron density and gas temperature are 4.79 × 10{sup 17 }m{sup −3} and 1667 K, respectively, for the operating conditions with microwave power of 500 W, gas flow rate of 20 l/min, and initial gas temperature of 500 K. The electromagnetic field distribution in the plasma source is obtained by solving Helmholtz equation. Electric field strength of 2.97 × 10{sup 4 }V/m is obtained. There is a broad variation on microwave power, gas flow rate, and initial gas temperature to obtain deeper information about the changes of the electron density and gas temperature.
- OSTI ID:
- 22600058
- Journal Information:
- Physics of Plasmas, Vol. 23, Issue 7; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
APPROXIMATIONS
ATMOSPHERIC PRESSURE
COMPUTERIZED SIMULATION
ELECTRIC FIELDS
ELECTROMAGNETIC FIELDS
ELECTRON DENSITY
ELECTRONS
FLOW RATE
GAS FLOW
HEAT
HEAT TRANSFER
HELIUM
LTE
MICROWAVE RADIATION
PLASMA
TEMPERATURE RANGE 0400-1000 K
TEMPERATURE RANGE 1000-4000 K
THREE-DIMENSIONAL CALCULATIONS
WAVE PROPAGATION