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Title: Experimental studies of the overshoot and undershoot in pulse-modulated radio-frequency atmospheric discharge

Abstract

The overshoot and undershoot of the applied voltage on the electrodes, the discharge current, and radio frequency (RF) power were observed at the initial phase of pulse-modulated (PM) RF atmospheric pressure discharges, but factors influencing the overshoot and undershoot have not been fully elucidated. In this paper, the experimental studies were performed to seek the reasons for the overshoot and undershoot. The experimental results show that the overshoot and undershoot are associated with the pulse frequency, the rise time of pulse signal, and the series capacitor C{sub s} in the inversely L-shaped matching network. In the case of a high RF power discharge, these overshoot and undershoot become serious when shortening the rise time of a pulse signal (5 ns) or operating at a moderate pulse frequency (500 Hz or 1 kHz).

Authors:
; ;  [1];  [2]
  1. School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029 (China)
  2. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023 (China)
Publication Date:
OSTI Identifier:
22599954
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 23; Journal Issue: 8; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ATMOSPHERIC PRESSURE; CAPACITORS; ELECTRIC POTENTIAL; ELECTRODES; PULSE RISE TIME; PULSES; RADIOWAVE RADIATION; SIGNALS

Citation Formats

Huo, W. G., Li, R. M., Shi, J. J., and Ding, Z. F., E-mail: huowg.wg@tom.com. Experimental studies of the overshoot and undershoot in pulse-modulated radio-frequency atmospheric discharge. United States: N. p., 2016. Web. doi:10.1063/1.4960676.
Huo, W. G., Li, R. M., Shi, J. J., & Ding, Z. F., E-mail: huowg.wg@tom.com. Experimental studies of the overshoot and undershoot in pulse-modulated radio-frequency atmospheric discharge. United States. doi:10.1063/1.4960676.
Huo, W. G., Li, R. M., Shi, J. J., and Ding, Z. F., E-mail: huowg.wg@tom.com. 2016. "Experimental studies of the overshoot and undershoot in pulse-modulated radio-frequency atmospheric discharge". United States. doi:10.1063/1.4960676.
@article{osti_22599954,
title = {Experimental studies of the overshoot and undershoot in pulse-modulated radio-frequency atmospheric discharge},
author = {Huo, W. G. and Li, R. M. and Shi, J. J. and Ding, Z. F., E-mail: huowg.wg@tom.com},
abstractNote = {The overshoot and undershoot of the applied voltage on the electrodes, the discharge current, and radio frequency (RF) power were observed at the initial phase of pulse-modulated (PM) RF atmospheric pressure discharges, but factors influencing the overshoot and undershoot have not been fully elucidated. In this paper, the experimental studies were performed to seek the reasons for the overshoot and undershoot. The experimental results show that the overshoot and undershoot are associated with the pulse frequency, the rise time of pulse signal, and the series capacitor C{sub s} in the inversely L-shaped matching network. In the case of a high RF power discharge, these overshoot and undershoot become serious when shortening the rise time of a pulse signal (5 ns) or operating at a moderate pulse frequency (500 Hz or 1 kHz).},
doi = {10.1063/1.4960676},
journal = {Physics of Plasmas},
number = 8,
volume = 23,
place = {United States},
year = 2016,
month = 8
}
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