A flexible setup for angle-resolved X-ray fluorescence spectrometry with laboratory sources

Journal Article · Tue Mar 15 00:00:00 EDT 2016 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4943253· OSTI ID:22597101

Herzog, C.; Grötzsch, D.; Kramer, F.; Mantouvalou, I.; Malzer, W.; Kanngießer, B. ^[1]; Lubeck, J.; Weser, J.; Streeck, C.; Beckhoff, B. ^[2]

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1. Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin (Germany)
2. Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin (Germany)

X-ray fluorescence (XRF) analysis is one of the standard tools for the analysis of stratified materials and is widely applied for the investigation of electronics and coatings. The composition and thickness of the layers can be determined quantitatively and non-destructively. Recent work showed that these capabilities can be extended towards retrieving stratigraphic information like concentration depth profiles using angle-resolved XRF (ARXRF). This paper introduces an experimental sample chamber which was developed as a multi-purpose tool enabling different measurement geometries suited for transmission measurements, conventional XRF, ARXRF, etc. The chamber was specifically designed for attaching all kinds of laboratory X-ray sources for the soft and hard X-ray ranges as well as various detection systems. In detail, a setup for ARXRF using an X-ray tube with a polycapillary X-ray lens as source is presented. For such a type of setup, both the spectral and lateral characterizations of the radiation field are crucial for quantitative ARXRF measurements. The characterization is validated with the help of a stratified validation sample.

• OSTI ID: 22597101
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 87; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
COATINGS
CONCENTRATION RATIO
FLUORESCENCE
FLUORESCENCE SPECTROSCOPY
GEOMETRY
HARD X RADIATION
LAYERS
LENSES
THICKNESS
VALIDATION
X-RAY FLUORESCENCE ANALYSIS
X-RAY SOURCES
X-RAY TUBES