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Title: Photosensitivity of p-type black Si field emitter arrays

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4948328· OSTI ID:22594655
; ;  [1]; ; ;  [2]
  1. School of Mathematics and Natural Sciences, Physics Department, University of Wuppertal, Wuppertal 42119 (Germany)
  2. Faculty of General Sciences and Microsystems Technology, OTH Regensburg, Regensburg 93053 (Germany)

We have investigated the properties of black Si field emitter arrays under strong electric fields and laser illumination. A low onset field of 1.8 MV/m for an emission current of 1 nA was obtained. A pronounced saturation region of the dark and photo-enhanced current was observed, which provided a short-term stability of 0.1% at 0.4 μA and 0.7% at 1.0 μA, respectively. As maximum value for the photosensitivity, an on-off current switching ratio of 43 reaching about 13 μA was achieved at a laser power of 15 mW. Electron spectra in the dark and under laser illumination are presented, showing a current and light-sensitive voltage drop across the emitters as well as hints for hot electron emission.

OSTI ID:
22594655
Journal Information:
Journal of Applied Physics, Vol. 119, Issue 16; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English