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Title: Measurement of atmospheric pressure microplasma jet with Langmuir probes

Journal Article · · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
DOI:https://doi.org/10.1116/1.4959565· OSTI ID:22592853
 [1]
  1. Department of Mechanical and Aerospace Engineering, University of Alabama in Huntsville, Huntsville, Alabama 35899 (United States)

A radio frequency argon microplasma jet at atmospheric-pressure is characterized using Langmuir probes. While optical methods are the typical diagnostic for these small scale plasmas, the simplicity and low cost of Langmuir probes makes them an attractive option. The plasma density and electron temperature are measured using existing high-pressure Langmuir probe theories developed for flames and arcs. The density and temperature vary from 1 × 10{sup 16} to 1 × 10{sup 19} m{sup −3} and 2.3 to 4.4 eV, respectively, depending on the operating condition. The density decreases while the electron temperature increases with axial distance from the jet exit. The applicability of the probe theories as well as the effect of collisionality and jet mixing is discussed.

OSTI ID:
22592853
Journal Information:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 34, Issue 5; Other Information: (c) 2016 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
Country of Publication:
United States
Language:
English