Effect of Ta concentration on the refractive index of TiO{sub 2}:Ta studied by spectroscopic ellipsometry

Journal Article · Tue Apr 19 00:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4945511· OSTI ID:22591154

Nurfani, Eka; Kurniawan, Robi; Muhammady, Shibghatullah; Marlina, Resti; Sutjahja, Inge M.; Winata, Toto ^[1]; Rusydi, Andrivo; Darma, Yudi ^[1]

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1. Department of Physics, Institut Teknologi Bandung, Ganesa 10 Bandung 40132 (Indonesia)

We have investigated optical properties of Ta-doped TiO{sub 2} thin film on LaAlO{sub 3} (LAO) substrate using Spectroscopic Ellipsometry (SE) at room temperature. Amplitude ratio Ψ and phase difference L1 between p- and s- polarized light waves are obtained by multiple incident angles measurement (60°, 70°, and 80°) at energy range of 0.5 – 6.5 eV. In order to obtain optical properties for every Ta concentrations (0.01, 0.4, and 5 at. %), multilayer modelling was performed simultaneously by using Drude-Lorentz model. Refractive index and optical dispersion parameters were determined by Wemple-DiDomenico relation. In general, refractive index at zero photon energy n(0) increases by increasing Ta concentration. Furthermore, optical band gap shows a significant increasing due to presence of Ta dopant. In addition, other optical constants are discussed as well.

• OSTI ID: 22591154
• Journal Information: AIP Conference Proceedings, Vol. 1725, Issue 1; Conference: ICAMST 2015: 3. international conference on advanced materials science and technology, Semarang (Indonesia), 6-7 Oct 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINATES
ANGULAR DISTRIBUTION
COMPUTERIZED SIMULATION
CONCENTRATION RATIO
DOPED MATERIALS
ELLIPSOMETRY
LANTHANUM OXIDES
LAYERS
OPTICAL DISPERSION
PHOTONS
REFRACTIVE INDEX
SUBSTRATES
TEMPERATURE RANGE 0273-0400 K
THIN FILMS
TITANIUM OXIDES
VISIBLE RADIATION