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A MEMS disk resonator-based band pass filter electrical equivalent circuit simulation

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.4945239· OSTI ID:22591113
; ;  [1];  [2]
  1. Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani, Rajasthan 333 031 (India)
  2. Central Electronics Engineering Research Institute, Pilani, Rajasthan 333 031 (India)

In this paper, coupled beam bandpass Disk filter is designed for 1 MHz bandwidth. Filter electrical equivalent circuit simulation is performed using circuit simulators. Important filter parameters such as insertion loss, shape factor and Q factor aresetimated using coventorware simulation. Disk resonator based radial contour mode filter provides 1.5 MHz bandwidth and unloaded quality factor of resonator and filter as 233480, 21797 respectively. From the simulation result it’s found that insertion loss minimum is 151.49 dB, insertion loss maximum is 213.94 dB, and 40 dB shape factor is 4.17.

OSTI ID:
22591113
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1724; ISSN APCPCS; ISSN 0094-243X
Country of Publication:
United States
Language:
English

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