Specific features of single-pulse femtosecond laser micron and submicron ablation of a thin silver film coated with a micron-thick photoresist layer

Journal Article · Sun May 31 00:00:00 EDT 2015 · Quantum Electronics (Woodbury, N.Y.)

DOI:https://doi.org/10.1070/QE2015V045N05ABEH015788· OSTI ID:22551257

Zayarnyi, D A; Ionin, A A; Kudryashov, S I; Makarov, S V; Rudenko, A A ^[1]; Drozdova, E A; Odinokov, S B ^[2]

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1. P N Lebedev Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
2. N.E. Bauman Moscow State Technical University, Moscow (Russian Federation)

Specific features of ablation of a thin silver film with a 1-μm-thick layer of a highly transparent photoresist and the same film without a photoresist layer under single tightly focused femtosecond laser pulses in the visible range (515 nm) are experimentally investigated. Interference effects of internal modification of the photoresist layer, its spallation ablation from the film surface and formation of through hollow submicron channels in the resist without its spallation but with ablation of the silver film lying under the resist are found and discussed. (extreme light fields and their applications)

• OSTI ID: 22551257
• Journal Information: Quantum Electronics (Woodbury, N.Y.), Vol. 45, Issue 5; Other Information: Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7818
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABLATION
INTERFERENCE
LASER RADIATION
PHOTORESISTORS
SILVER
SPALLATION
SURFACES
THIN FILMS