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Title: Fabrication of microchannels in fused silica using femtosecond Bessel beams

Abstract

Extended birefringent waveguiding microchannels up to 15 mm long were created inside fused silica by single-pulse irradiation with femtosecond Bessel beams. The birefringent refractive index change of 2–4 × 10{sup −4} is attributed to residual mechanical stress. The microchannels were chemically etched in KOH solution to produce 15 mm long microcapillaries with smooth walls and a high aspect ratio of 1:250. Bessel beams provide higher speed of material processing compared to conventional multipulse femtosecond laser micromachining techniques and permit simple control of the optical axis direction of the birefringent waveguides, which is important for practical applications [Corrielli et al., “Rotated waveplates in integrated waveguide optics,” Nat. Commun. 5, 4249 (2014)].

Authors:
 [1]; ;  [1]
  1. Institute of Applied Physics of the Russian Academy of Sciences, 46 Ulyanov Str., Nizhny Novgorod 603950 (Russian Federation)
Publication Date:
OSTI Identifier:
22494821
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 118; Journal Issue: 9; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ASPECT RATIO; BEAMS; FABRICATION; LASER BEAM MACHINING; MATHEMATICAL SOLUTIONS; POTASSIUM HYDROXIDES; PULSED IRRADIATION; REFRACTIVE INDEX; RESIDUAL STRESSES; SILICA; WAVEGUIDES

Citation Formats

Yashunin, D. A., E-mail: yashuninda@yandex.ru, Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950, Malkov, Yu. A., Mochalov, L. A., Stepanov, A. N., Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950, and Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Ave., Nizhny Novgorod 603950. Fabrication of microchannels in fused silica using femtosecond Bessel beams. United States: N. p., 2015. Web. doi:10.1063/1.4929649.
Yashunin, D. A., E-mail: yashuninda@yandex.ru, Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950, Malkov, Yu. A., Mochalov, L. A., Stepanov, A. N., Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950, & Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Ave., Nizhny Novgorod 603950. Fabrication of microchannels in fused silica using femtosecond Bessel beams. United States. doi:10.1063/1.4929649.
Yashunin, D. A., E-mail: yashuninda@yandex.ru, Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950, Malkov, Yu. A., Mochalov, L. A., Stepanov, A. N., Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950, and Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Ave., Nizhny Novgorod 603950. Mon . "Fabrication of microchannels in fused silica using femtosecond Bessel beams". United States. doi:10.1063/1.4929649.
@article{osti_22494821,
title = {Fabrication of microchannels in fused silica using femtosecond Bessel beams},
author = {Yashunin, D. A., E-mail: yashuninda@yandex.ru and Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950 and Malkov, Yu. A. and Mochalov, L. A. and Stepanov, A. N. and Nizhny Novgorod State Technical University, 24 Minin St., Nizhny Novgorod 603950 and Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Ave., Nizhny Novgorod 603950},
abstractNote = {Extended birefringent waveguiding microchannels up to 15 mm long were created inside fused silica by single-pulse irradiation with femtosecond Bessel beams. The birefringent refractive index change of 2–4 × 10{sup −4} is attributed to residual mechanical stress. The microchannels were chemically etched in KOH solution to produce 15 mm long microcapillaries with smooth walls and a high aspect ratio of 1:250. Bessel beams provide higher speed of material processing compared to conventional multipulse femtosecond laser micromachining techniques and permit simple control of the optical axis direction of the birefringent waveguides, which is important for practical applications [Corrielli et al., “Rotated waveplates in integrated waveguide optics,” Nat. Commun. 5, 4249 (2014)].},
doi = {10.1063/1.4929649},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 9,
volume = 118,
place = {United States},
year = {2015},
month = {9}
}