Formation of continuous metallic film on quartz studied by noncontact resonant ultrasound spectroscopy

Journal Article · Fri Aug 28 00:00:00 EDT 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4928959· OSTI ID:22494802

Yoshimura, N.; Ogi, H.; Hirao, M. ^[1]

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1. Osaka University, Graduate School of Engineering Science, Toyonaka, Osaka 560-8531 (Japan)

Dynamics of continuous film formation of metallic films on quartz substrates is studied using an electrodeless resonance method. Bare quartz is used as a substrate, and a metallic film is deposited on it. We use antenna transmission technique to measure the evolution of resonance frequencies and internal friction of the substrate during and after deposition, and the morphological transition between discontinuous islands and a continuous film is detected. By comparison with atomic force microscopy images, we confirm that the frequency drop and the internal-friction peak that appear during deposition indicate this transition. We also find that Pt film shows unexpected morphology change after deposition.

• OSTI ID: 22494802
• Journal Information: Journal of Applied Physics, Vol. 118, Issue 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ANTENNAS
ATOMIC FORCE MICROSCOPY
COMPARATIVE EVALUATIONS
DEPOSITION
INTERNAL FRICTION
METALS
MORPHOLOGY
QUARTZ
RESONANCE
SPECTROSCOPY
SUBSTRATES
THIN FILMS
ULTRASONIC WAVES