Large area fabrication of plasmonic nanoparticle grating structure by conventional scanning electron microscope

Journal Article · Wed Jun 24 00:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4917690· OSTI ID:22490247

Sudheer,; Tiwari, P.; Rai, V. N.; Srivastava, A. K. ^[1]; Mukharjee, C. ^[2]

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1. Indus Synchrotron Utilization Division, Raja Ramanna Centre for Advance Technology, Indore-452013 (India)
2. Mechanical & Optical Support Section, Raja Ramanna Centre for Advance Technology, Indore 452013 (India)

Plasmonic nanoparticle grating (PNG) structure of different periods has been fabricated by electron beam lithography using silver halide based transmission electron microscope film as a substrate. Conventional scanning electron microscope is used as a fabrication tool for electron beam lithography. Optical microscope and energy dispersive spectroscopy (EDS) have been used for its morphological and elemental characterization. Optical characterization is performed by UV-Vis absorption spectroscopic technique.

• OSTI ID: 22490247
• Journal Information: AIP Conference Proceedings, Vol. 1665, Issue 1; Conference: 59. DAE solid state physics symposium 2014, Tamilnadu (India), 16-20 Dec 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION
ABSORPTION SPECTROSCOPY
ELECTRON BEAMS
FABRICATION
FILMS
PLASMONS
SCANNING ELECTRON MICROSCOPY
SILVER HALIDES
SUBSTRATES
TRANSMISSION ELECTRON MICROSCOPY
ULTRAVIOLET SPECTRA
VISIBLE SPECTRA
X-RAY SPECTROSCOPY