skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Effect of intermetallic compounds on the thermal conductivity of Ti-Cu composites

Journal Article · · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
DOI:https://doi.org/10.1116/1.4939142· OSTI ID:22489791
 [1]
  1. Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695 (United States)

Ti films were deposited by magnetron sputtering on polycrystalline Cu substrates. The samples were annealed at different temperatures and characterized by x-ray diffraction for phase identification, scanning electron microscopy, and energy dispersive spectrometry for microstructure and composition and transient thermoreflectance for thermal conductivity and interface thermal conductance. The results showed that the diffused layer of Ti in Cu contained intermetallic compounds and solid solution of Ti in Cu. The thermal conductivity of the diffused layer is reduced, and the thickness increased for higher annealing temperature. The interface thermal conductance also decreased for higher temperature of annealing. A stable Cu{sub 4}Ti phase was formed after annealing at 725 °C with thermal conductivity of 10 W m{sup −1} K{sup −1}. The interface thermal conductance between the intermetallic compound and the solid solution of Ti in Cu also was reduced to 30 MW m{sup −2} K{sup −1}. The effective thermal resistance of the diffused layer and the interface was found to increase for higher annealing temperature.

OSTI ID:
22489791
Journal Information:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 34, Issue 2; Other Information: (c) 2016 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
Country of Publication:
United States
Language:
English

Similar Records

Thermal conductivity of nitride films of Ti, Cr, and W deposited by reactive magnetron sputtering
Journal Article · Fri May 15 00:00:00 EDT 2015 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:22489791

Deformation-induced amorphization of Cu-Ti intermetallics
Miscellaneous · Thu Dec 31 00:00:00 EST 1992 · OSTI ID:22489791

Nucleation and growth of Ti{sub 2}AlN thin films deposited by reactive magnetron sputtering onto MgO(111)
Journal Article · Mon Oct 01 00:00:00 EDT 2007 · Journal of Applied Physics · OSTI ID:22489791