Resolution enhancement in transmission electron microscopy with 60-kV monochromated electron source

Journal Article · Mon Jan 04 04:00:00 EST 2016 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4939653· OSTI ID:22489257

Morishita, Shigeyuki; Mukai, Masaki; Sawada, Hidetaka ^[1]; Suenaga, Kazutomo ^[2]

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1. JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558 (Japan)
2. National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565 (Japan)

Transmission electron microscopy (TEM) at low accelerating voltages is useful to obtain images with low irradiation damage. For a low accelerating voltage, linear information transfer, which determines the resolution for observation of single-layered materials, is largely limited by defocus spread, which improves when a narrow energy spread is used in the electron source. In this study, we have evaluated the resolution of images obtained at 60 kV by TEM performed with a monochromated electron source. The defocus spread has been evaluated by comparing diffractogram tableaux from TEM images obtained under nonmonochromated and monochromated illumination. The information limits for different energy spreads were precisely measured by using diffractograms with a large beam tilt. The result shows that the information limit reaches 0.1 nm with an energy width of 0.10 eV. With this monochromated source and a higher-order aberration corrector, we have obtained images of single carbon atoms in a graphene sheet by TEM at 60 kV.

• OSTI ID: 22489257
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 108; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ELECTRIC POTENTIAL
ELECTRON SOURCES
GRAPHENE
IMAGES
INFORMATION
RESOLUTION
TRANSMISSION ELECTRON MICROSCOPY