Discharge regime of non-ambipolarity with a self-induced steady-state magnetic field in plasma sources with localized radio-frequency power deposition

Journal Article · Thu Oct 15 04:00:00 EDT 2015 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4933411· OSTI ID:22486404

Lishev, St.; Todorov, D.; Paunska, Ts. ^[1]

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1. Faculty of Physics, Sofia University, BG-1164 Sofia (Bulgaria)

Involving the idea for the Biermann effect known from space physics as well as recent discussions on non-ambipolarity of the electron and ion fluxes in low-pressure discharges, the study builds the discharge pattern in a source with localized RF power deposition outside the region of high electron density. A vortex dc current flowing in an RF discharge and a steady-state magnetic field induced by this current govern the discharge behavior. Owing to a shift in the positions of the electron-density and plasma-potential maxima, the dc current is driven with the purpose of keeping the conservativity of the dc field in the discharge. The results present the spatial structure of a discharge in a regime of non-ambipolarity of the electron and ion fluxes, including its modifications by the magnetic field.

• OSTI ID: 22486404
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 22; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRON DENSITY
MAGNETIC FIELDS
PLASMA POTENTIAL
PRESSURE RANGE KILO PA
RADIOWAVE RADIATION
STEADY-STATE CONDITIONS
VORTICES