skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Nitrogen ion implantation into various materials using 28 GHz electron cyclotron resonance ion source

Abstract

The installation of the 28 GHz electron cyclotron resonance ion source (ECRIS) ion implantation beamline was recently completed at the Korea Basic Science Institute. The apparatus contains a beam monitoring system and a sample holder for the ion implantation process. The new implantation system can function as a multipurpose tool since it can implant a variety of ions, ranging hydrogen to uranium, into different materials with precise control and with implantation areas as large as 1–10 mm{sup 2}. The implantation chamber was designed to measure the beam properties with a diagnostic system as well as to perform ion implantation with an in situ system including a mass spectrometer. This advanced implantation system can be employed in novel applications, including the production of a variety of new materials such as metals, polymers, and ceramics and the irradiation testing and fabrication of structural and functional materials to be used in future nuclear fusion reactors. In this investigation, the first nitrogen ion implantation experiments were conducted using the new system. The 28 GHz ECRIS implanted low-energy, multi-charged nitrogen ions into copper, zinc, and cobalt substrates, and the ion implantation depth profiles were obtained. SRIM 2013 code was used to calculate the profiles undermore » identical conditions, and the experimental and simulation results are presented and compared in this report. The depths and ranges of the ion distributions in the experimental and simulation results agree closely and demonstrate that the new system will enable the treatment of various substrates for advanced materials research.« less

Authors:
 [1];  [2]; ; ; ; ; ; ; ; ; ;  [1];  [3]
  1. Busan Center, Korea Basic Science Institute, Busan 609-735 (Korea, Republic of)
  2. (Korea, Republic of)
  3. School of Mechanical Engineering, Pusan National University, Pusan 609-735 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22482873
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; BEAM MONITORING; CERAMICS; COBALT; CONTROL; COPPER; DEPTH; ECR ION SOURCES; GHZ RANGE 01-100; ION IMPLANTATION; MASS SPECTROMETERS; MATERIALS; NITROGEN IONS; SAMPLE HOLDERS; SIMULATION; SUBSTRATES; THERMONUCLEAR REACTORS

Citation Formats

Shin, Chang Seouk, School of Mechanical Engineering, Pusan National University, Pusan 609-735, Lee, Byoung-Seob, Choi, Seyong, Yoon, Jang-Hee, Kim, Hyun Gyu, Ok, Jung-Woo, Park, Jin Yong, Kim, Seong Jun, Bahng, Jungbae, Hong, Jonggi, Won, Mi-Sook, E-mail: mswon@kbsi.re.kr, and Lee, Seung Wook, E-mail: Seunglee@pusan.ac.kr. Nitrogen ion implantation into various materials using 28 GHz electron cyclotron resonance ion source. United States: N. p., 2016. Web. doi:10.1063/1.4932126.
Shin, Chang Seouk, School of Mechanical Engineering, Pusan National University, Pusan 609-735, Lee, Byoung-Seob, Choi, Seyong, Yoon, Jang-Hee, Kim, Hyun Gyu, Ok, Jung-Woo, Park, Jin Yong, Kim, Seong Jun, Bahng, Jungbae, Hong, Jonggi, Won, Mi-Sook, E-mail: mswon@kbsi.re.kr, & Lee, Seung Wook, E-mail: Seunglee@pusan.ac.kr. Nitrogen ion implantation into various materials using 28 GHz electron cyclotron resonance ion source. United States. doi:10.1063/1.4932126.
Shin, Chang Seouk, School of Mechanical Engineering, Pusan National University, Pusan 609-735, Lee, Byoung-Seob, Choi, Seyong, Yoon, Jang-Hee, Kim, Hyun Gyu, Ok, Jung-Woo, Park, Jin Yong, Kim, Seong Jun, Bahng, Jungbae, Hong, Jonggi, Won, Mi-Sook, E-mail: mswon@kbsi.re.kr, and Lee, Seung Wook, E-mail: Seunglee@pusan.ac.kr. Mon . "Nitrogen ion implantation into various materials using 28 GHz electron cyclotron resonance ion source". United States. doi:10.1063/1.4932126.
@article{osti_22482873,
title = {Nitrogen ion implantation into various materials using 28 GHz electron cyclotron resonance ion source},
author = {Shin, Chang Seouk and School of Mechanical Engineering, Pusan National University, Pusan 609-735 and Lee, Byoung-Seob and Choi, Seyong and Yoon, Jang-Hee and Kim, Hyun Gyu and Ok, Jung-Woo and Park, Jin Yong and Kim, Seong Jun and Bahng, Jungbae and Hong, Jonggi and Won, Mi-Sook, E-mail: mswon@kbsi.re.kr and Lee, Seung Wook, E-mail: Seunglee@pusan.ac.kr},
abstractNote = {The installation of the 28 GHz electron cyclotron resonance ion source (ECRIS) ion implantation beamline was recently completed at the Korea Basic Science Institute. The apparatus contains a beam monitoring system and a sample holder for the ion implantation process. The new implantation system can function as a multipurpose tool since it can implant a variety of ions, ranging hydrogen to uranium, into different materials with precise control and with implantation areas as large as 1–10 mm{sup 2}. The implantation chamber was designed to measure the beam properties with a diagnostic system as well as to perform ion implantation with an in situ system including a mass spectrometer. This advanced implantation system can be employed in novel applications, including the production of a variety of new materials such as metals, polymers, and ceramics and the irradiation testing and fabrication of structural and functional materials to be used in future nuclear fusion reactors. In this investigation, the first nitrogen ion implantation experiments were conducted using the new system. The 28 GHz ECRIS implanted low-energy, multi-charged nitrogen ions into copper, zinc, and cobalt substrates, and the ion implantation depth profiles were obtained. SRIM 2013 code was used to calculate the profiles under identical conditions, and the experimental and simulation results are presented and compared in this report. The depths and ranges of the ion distributions in the experimental and simulation results agree closely and demonstrate that the new system will enable the treatment of various substrates for advanced materials research.},
doi = {10.1063/1.4932126},
journal = {Review of Scientific Instruments},
number = 2,
volume = 87,
place = {United States},
year = {Mon Feb 15 00:00:00 EST 2016},
month = {Mon Feb 15 00:00:00 EST 2016}
}