Modulation of microstructure and optical properties of Mo-doped ZnO thin films by substrate temperature

Journal Article · Fri May 15 04:00:00 EDT 2015 · Materials Research Bulletin

DOI:https://doi.org/10.1016/J.MATERRESBULL.2015.01.004· OSTI ID:22475751

Zhang, J. W. ^[1]; Li, T. S. ^[1]; Liu, M. ^[2]; Chen, X. S. ^[3]; Liu, Y. M.; Sun, Z. Q. ^[1]

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1. School of physics and Materials Science, Anhui University, Hefei 230601 (China)
2. Key Laboratory of Materials Physics, Anhui Key Laboratory of Nanomaterials and Nanostructure, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031 (China)
3. National Laboratory for Infrared Physics, Chinese Academy of Sciences, Shanghai Institute of Technical Physics, 500 Yutian Road, Shanghai 200083 (China)

Highlights: • Mo-doped ZnO films are obtained by sputtering at various substrate temperatures. • High-quality MZO thin films with good crystalline have been obtained at 200 °C. • Deposition temperature affects the amount of defects in the crystalline structure - Abstract: Mo-doped ZnO(MZO) films were deposited on Si (1 1 1) substrates by radio frequency sputtering at different substrate temperatures of 200, 300 and 400 °C. The effect of the substrate temperature on the structural and optical properties of the MZO films has been investigated. X-ray diffraction results reveal that all the films are polycrystalline with a hexagonal wurtzite structure with a preferential orientation according to the direction (0 0 2) plane. The crystallinity and surface morphologies of the films are strongly dependent on the growth temperature, which in turn exerts a great effect on microstructural and optical properties of the MZO films. The optical absorption measurements show high ultraviolet (UV) absorbance property of MZO with sharp and intense absorption band in this region and the optical band gap (E{sub g}) are 3.18, 3.22, 3.25 and 3.21 eV for the films deposited at room temperature, 200, 300 and 400 °C. The photoluminescence (PL) intensity of a strong broad violet–blue emission from MZO nanostructures with increasing deposited temperature was also observed. X-ray photoelectron spectroscopy (XPS) was employed to investigate the surface chemical composition of growth products.

• OSTI ID: 22475751
• Journal Information: Materials Research Bulletin, Journal Name: Materials Research Bulletin Vol. 65; ISSN MRBUAC; ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION
DEFECTS
DEPOSITION
DOPED MATERIALS
MICROSTRUCTURE
MODULATION
MOLYBDENUM ADDITIONS
NANOSTRUCTURES
OPTICAL PROPERTIES
PHOTOLUMINESCENCE
SILICON
SUBSTRATES
SURFACES
THIN FILMS
ULTRAVIOLET RADIATION
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY
ZINC OXIDES