Study of silicon strip waveguides with diffraction gratings and photonic crystals tuned to a wavelength of 1.5 µm

Journal Article · Tue Dec 15 00:00:00 EST 2015 · Semiconductors

DOI:https://doi.org/10.1134/S1063782615130047· OSTI ID:22469657

Vyatkin, A. F.; Volkov, V. T.; Gruzintsev, A. N.; Il’in, A. I.; Trofimov, O. V. ^[1]

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1. Russian Academy of Sciences, Institute of Microelectronics Technology and High-Purity Materials (Russian Federation)

Single-mode submicrometer-thick strip waveguides on silicon-on-insulator substrates, fabricated by silicon-planar-technology methods are considered. To solve the problem of 1.5-µm wavelength radiation input-output and its frequency filtering, strip diffraction gratings and two-dimensional photonic crystals are integrated into waveguides. The reflection and transmission spectra of gratings and photonic crystals are calculated. The waveguide-mode-attenuation coefficient for a polycrystalline silicon waveguide is experimentally estimated.

• OSTI ID: 22469657
• Journal Information: Semiconductors, Vol. 49, Issue 13; Other Information: Copyright (c) 2015 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7826
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION SPECTROSCOPY
ATTENUATION
DIFFRACTION GRATINGS
FILTERS
POLYCRYSTALS
REFLECTION
SILICON
SPECTRAL REFLECTANCE
SUBSTRATES
TWO-DIMENSIONAL SYSTEMS
WAVEGUIDES
WAVELENGTHS