Study of silicon strip waveguides with diffraction gratings and photonic crystals tuned to a wavelength of 1.5 µm
- Russian Academy of Sciences, Institute of Microelectronics Technology and High-Purity Materials (Russian Federation)
Single-mode submicrometer-thick strip waveguides on silicon-on-insulator substrates, fabricated by silicon-planar-technology methods are considered. To solve the problem of 1.5-µm wavelength radiation input-output and its frequency filtering, strip diffraction gratings and two-dimensional photonic crystals are integrated into waveguides. The reflection and transmission spectra of gratings and photonic crystals are calculated. The waveguide-mode-attenuation coefficient for a polycrystalline silicon waveguide is experimentally estimated.
- OSTI ID:
- 22469657
- Journal Information:
- Semiconductors, Journal Name: Semiconductors Journal Issue: 13 Vol. 49; ISSN SMICES; ISSN 1063-7826
- Country of Publication:
- United States
- Language:
- English
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