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Title: Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

Abstract

The total energy lost per electron-ion pair lost ε{sub T} is investigated with the electron energy distribution function (EEDF). The EEDFs are measured at various argon powers in RF inductively coupled plasma, and the EEDFs show a depleted distribution (a discontinuity occurring at the minimum argon excitation threshold energy level) with the bulk temperature and the tail temperature. The total energy loss per electron-ion pair lost ε{sub T} is calculated from a power balance model with the Maxwellian EEDFs and the depleted EEDFs and then compared with the measured ε{sub T} from the floating probe. It is concluded that the small population of the depleted high energy electrons dramatically increases the collisional energy loss, and the calculated ε{sub T} from the depleted EEDFs has a value that is similar to the measured ε{sub T}.

Authors:
;  [1]; ;  [2]
  1. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)
  2. Department of Electrical Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22408028
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 22; Journal Issue: 1; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; COLLISIONS; DISTRIBUTION FUNCTIONS; ELECTRONS; ENERGY LOSSES; ENERGY SPECTRA; EXCITATION; ION PAIRS; PLASMA; PROBES; THRESHOLD ENERGY

Citation Formats

Kim, June Young, Kim, Young-Cheol, Kim, Yu-Sin, and Chung, Chin-Wook, E-mail: joykang@hanyang.ac.kr. Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas. United States: N. p., 2015. Web. doi:10.1063/1.4905515.
Kim, June Young, Kim, Young-Cheol, Kim, Yu-Sin, & Chung, Chin-Wook, E-mail: joykang@hanyang.ac.kr. Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas. United States. doi:10.1063/1.4905515.
Kim, June Young, Kim, Young-Cheol, Kim, Yu-Sin, and Chung, Chin-Wook, E-mail: joykang@hanyang.ac.kr. 2015. "Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas". United States. doi:10.1063/1.4905515.
@article{osti_22408028,
title = {Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas},
author = {Kim, June Young and Kim, Young-Cheol and Kim, Yu-Sin and Chung, Chin-Wook, E-mail: joykang@hanyang.ac.kr},
abstractNote = {The total energy lost per electron-ion pair lost ε{sub T} is investigated with the electron energy distribution function (EEDF). The EEDFs are measured at various argon powers in RF inductively coupled plasma, and the EEDFs show a depleted distribution (a discontinuity occurring at the minimum argon excitation threshold energy level) with the bulk temperature and the tail temperature. The total energy loss per electron-ion pair lost ε{sub T} is calculated from a power balance model with the Maxwellian EEDFs and the depleted EEDFs and then compared with the measured ε{sub T} from the floating probe. It is concluded that the small population of the depleted high energy electrons dramatically increases the collisional energy loss, and the calculated ε{sub T} from the depleted EEDFs has a value that is similar to the measured ε{sub T}.},
doi = {10.1063/1.4905515},
journal = {Physics of Plasmas},
number = 1,
volume = 22,
place = {United States},
year = 2015,
month = 1
}
  • No abstract prepared.
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