Stoichiometry control of complex oxides by sequential pulsed-laser deposition from binary-oxide targets

Journal Article · Mon Mar 30 00:00:00 EDT 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4916948· OSTI ID:22398807

Herklotz, A. ^[1]; Dörr, K. ^[2]; Ward, T. Z.; Eres, G. ^[1]; Christen, H. M.; Biegalski, M. D. ^[3]

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1. ORNL, Materials Science and Technology Division, Bethel Valley Road, Oak Ridge, Tennessee 37831-6056 (United States)
2. Martin Luther University Halle-Wittenberg, Institute for Physics, Von-Danckelmann-Platz 3, 06120 Halle (Germany)
3. ORNL, Center for Nanophase Materials Sciences, Bethel Valley Road, Oak Ridge, Tennessee 37831-6496 (United States)

To have precise atomic layer control over interfaces, we examine the growth of complex oxides through the sequential deposition from binary targets by pulsed laser deposition. In situ reflection high-energy electron diffraction (RHEED) is used to control the growth and achieve films with excellent structural quality. The growth from binary oxide targets is fundamentally different from single target growth modes and shows more similarities to shuttered growth by molecular beam epitaxy. The RHEED intensity oscillations of non-stoichiometric growth are consistent with a model of island growth and accumulation of excess material on the surface that can be utilized to determine the correct stoichiometry for growth. Correct monolayer doses can be determined through an envelope frequency in the RHEED intensity oscillations. In order to demonstrate the ability of this growth technique to create complex heterostructures, the artificial n = 2 and 3 Sr{sub n+1}Ti{sub n}O{sub 3n+1} Ruddlesden-Popper phases are grown with good long-range order. This method enables the precise unit-cell level control over the structure of perovskite-type oxides, and thus the growth of complex materials with improved structural quality and electronic functionality.

• OSTI ID: 22398807
• Journal Information: Applied Physics Letters, Vol. 106, Issue 13; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BUILDUP
CONTROL
ELECTRON DIFFRACTION
ENERGY BEAM DEPOSITION
FILMS
INTERFACES
LASER RADIATION
LAYERS
MOLECULAR BEAM EPITAXY
NITRATES
NITROGEN OXIDES
OSCILLATIONS
PEROVSKITE
PULSED IRRADIATION
REFLECTION
STOICHIOMETRY
STRONTIUM TITANATES
SURFACES