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Title: Ion energies in high power impulse magnetron sputtering with and without localized ionization zones

Abstract

High speed imaging of high power impulse magnetron sputtering discharges has revealed that ionization is localized in moving ionization zones but localization disappears at high currents for high yield targets. This offers an opportunity to study the effect ionization zones have on ion energies. We measure that ions have generally higher energies when ionization zones are present, supporting the concept that these zones are associated with moving potential humps. We propose that the disappearance of ionization zones is caused by an increased supply of atoms from the target which cools electrons and reduces depletion of atoms to be ionized.

Authors:
 [1];  [2];  [3];  [4];  [3];  [2];  [3]
  1. School of Materials Science and Engineering, State Key Lab for Materials Processing and Die and Mold Technology, Huazhong University of Science and Technology, Wuhan 430074 (China)
  2. (United States)
  3. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)
  4. (Japan)
Publication Date:
OSTI Identifier:
22398796
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 12; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ATOMS; AVAILABILITY; ELECTROMAGNETIC PULSES; ELECTRONS; IONIZATION; IONS; MAGNETRONS; POTENTIALS; SPUTTERING; VELOCITY; YIELDS; ZONES

Citation Formats

Yang, Yuchen, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, Tanaka, Koichi, Central Research Institute, Mitsubishi Materials Corporation, 1002-14 Mukohyama, Naka-shi, Ibaraki 311-0102, Liu, Jason, Department of Physics, University of California Berkeley, Berkeley, California 94720, and Anders, André. Ion energies in high power impulse magnetron sputtering with and without localized ionization zones. United States: N. p., 2015. Web. doi:10.1063/1.4916233.
Yang, Yuchen, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, Tanaka, Koichi, Central Research Institute, Mitsubishi Materials Corporation, 1002-14 Mukohyama, Naka-shi, Ibaraki 311-0102, Liu, Jason, Department of Physics, University of California Berkeley, Berkeley, California 94720, & Anders, André. Ion energies in high power impulse magnetron sputtering with and without localized ionization zones. United States. doi:10.1063/1.4916233.
Yang, Yuchen, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, Tanaka, Koichi, Central Research Institute, Mitsubishi Materials Corporation, 1002-14 Mukohyama, Naka-shi, Ibaraki 311-0102, Liu, Jason, Department of Physics, University of California Berkeley, Berkeley, California 94720, and Anders, André. Mon . "Ion energies in high power impulse magnetron sputtering with and without localized ionization zones". United States. doi:10.1063/1.4916233.
@article{osti_22398796,
title = {Ion energies in high power impulse magnetron sputtering with and without localized ionization zones},
author = {Yang, Yuchen and Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 and Tanaka, Koichi and Central Research Institute, Mitsubishi Materials Corporation, 1002-14 Mukohyama, Naka-shi, Ibaraki 311-0102 and Liu, Jason and Department of Physics, University of California Berkeley, Berkeley, California 94720 and Anders, André},
abstractNote = {High speed imaging of high power impulse magnetron sputtering discharges has revealed that ionization is localized in moving ionization zones but localization disappears at high currents for high yield targets. This offers an opportunity to study the effect ionization zones have on ion energies. We measure that ions have generally higher energies when ionization zones are present, supporting the concept that these zones are associated with moving potential humps. We propose that the disappearance of ionization zones is caused by an increased supply of atoms from the target which cools electrons and reduces depletion of atoms to be ionized.},
doi = {10.1063/1.4916233},
journal = {Applied Physics Letters},
number = 12,
volume = 106,
place = {United States},
year = {Mon Mar 23 00:00:00 EDT 2015},
month = {Mon Mar 23 00:00:00 EDT 2015}
}