Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
Journal Article
·
· Review of Scientific Instruments
- School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308 (Australia)
A new microelectromechanical systems-based 2-degree-of-freedom (DoF) scanner with an integrated cantilever for on-chip atomic force microscopy (AFM) is presented. The silicon cantilever features a layer of piezoelectric material to facilitate its use for tapping mode AFM and enable simultaneous deflection sensing. Electrostatic actuators and electrothermal sensors are used to accurately position the cantilever within the x-y plane. Experimental testing shows that the cantilever is able to be scanned over a 10 μm × 10 μm window and that the cantilever achieves a peak-to-peak deflection greater than 400 nm when excited at its resonance frequency of approximately 62 kHz.
- OSTI ID:
- 22392484
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 4 Vol. 86; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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