The method for measuring the groove density of variable-line-space gratings with elimination of the eccentricity effect

Journal Article · Sun Feb 15 00:00:00 EST 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4908138· OSTI ID:22392350

Wang, Qingbo; Liu, Zhengkun; Chen, Huoyao; Wang, Yu; Jiang, Xiaolong; Fu, Shaojun ^[1]

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1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei (China)

To eliminate the eccentricity effect, a new method for measuring the groove density of a variable-line-space grating was adapted. Based on grating equation, groove density is calculated by measuring the internal angles between zeroth-order and first-order diffracted light for two different wavelengths with the same angle of incidence. The measurement system mainly includes two laser sources, a phase plate, plane mirror, and charge coupled device. The measurement results of a variable-line-space grating demonstrate that the experiment data agree well with theoretical values, and the value of measurement error (ΔN/N) is less than 2.72 × 10{sup −4}.

• OSTI ID: 22392350
• Journal Information: Review of Scientific Instruments, Vol. 86, Issue 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
CHARGE-COUPLED DEVICES
DENSITY
ERRORS
GRATINGS
INCIDENCE ANGLE
LASERS
MIRRORS
PLATES
WAVELENGTHS