The method for measuring the groove density of variable-line-space gratings with elimination of the eccentricity effect
Journal Article
·
· Review of Scientific Instruments
- National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei (China)
To eliminate the eccentricity effect, a new method for measuring the groove density of a variable-line-space grating was adapted. Based on grating equation, groove density is calculated by measuring the internal angles between zeroth-order and first-order diffracted light for two different wavelengths with the same angle of incidence. The measurement system mainly includes two laser sources, a phase plate, plane mirror, and charge coupled device. The measurement results of a variable-line-space grating demonstrate that the experiment data agree well with theoretical values, and the value of measurement error (ΔN/N) is less than 2.72 × 10{sup −4}.
- OSTI ID:
- 22392350
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 86; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
Similar Records
Two-dimensional groove density measurement for gratings by diffraction method
Determination of groove spacings for concave diffraction gratings
Measurement of absolute diffraction efficiency of a variable line spaced grating using reflectivity beamline
Journal Article
·
Wed Jul 27 00:00:00 EDT 2016
· AIP Conference Proceedings
·
OSTI ID:22608421
Determination of groove spacings for concave diffraction gratings
Journal Article
·
Sun Oct 31 23:00:00 EST 2004
· Review of Scientific Instruments
·
OSTI ID:20643989
Measurement of absolute diffraction efficiency of a variable line spaced grating using reflectivity beamline
Journal Article
·
Tue Jun 05 00:00:00 EDT 2012
· AIP Conference Proceedings
·
OSTI ID:22004135