LaMnO{sub 3} perovskite thin film deposition, from aqueous nitrate solutions of La and Mn, in a low pressure plasma expanded through a nozzle

Conference · Sat Jul 01 04:00:00 EDT 1995

OSTI ID:223668

Miralaie, S F; Morvan, D; Amouroux, J ^[1]

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1. ENSCP rue Pierret et Marie Curie, Paris (France); and others

In the inductively coupled RF Plasma Expanded Through a Nozzle (PETN) of Ar + O{sub 2} mixtures, perovskite thin films as LaMnO{sub 3} were deposited from La and Mn nitrate aqueous solutions. The PETN using aqueous solutions is a new method to deposit thin films of ceramic oxides. An ultrasonic nebulizer operating at atmospheric pressure introduce the precursors aerosol through a valve in a pulsating mode. The aerosol passing the RF Ar + O{sub 2} plasma produces a shock wave prior to the nozzle, evaporating the excess of H{sub 2}O and decomposing the H{sub 2}O and the nitrate of La and Mn. The molecular spectra of LaO and MnO was measured in the shock wave prior expanding through the nozzle. This a new low-temperature process for ceramic oxide thin film deposition.

• Research Organization: International Union of Pure and Applied Chemistry; American Physical Society, New York, NY (United States)
• OSTI ID: 223668
• Report Number(s): CONF-950875--Vol.4
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DEPOSITION
EXPANSION
LANTHANUM COMPOUNDS
MANGANATES
PHASE STUDIES
PLASMA ARC SPRAYING
THIN FILMS