Directly patternable SnO{sub 2} thin films incorporating Pt nanoparticles

Journal Article · Tue Apr 01 04:00:00 EDT 2014 · Materials Research Bulletin

DOI:https://doi.org/10.1016/J.MATERRESBULL.2013.12.062· OSTI ID:22345253

Kim, Hyuncheol; Choi, Yong-June; Kang, Kyung-Mun; Park, Hyung-Ho

Highlights: • Direct-patterning of SnO{sub 2} films incorporated with Pt nanoparticles. • Pt incorporated SnO{sub 2} thin films by using photochemical solution deposition. • Reduction catalytic behavior of Pt nanoparticles. • Progress reduction of SnO{sub 2} with increasing amount of Pt nanoparticles. • Enhanced electrical conductivity of SnO{sub 2} films with Pt nanoparticles incorporation. - Abstract: Direct-patterning of SnO{sub 2} films incorporating Pt nanoparticles was performed by using a photochemical solution deposition without a photoresist or dry etching. Incorporating Pt nanoparticles into these films had a slight effect on their crystallinity and almost no effect on their transmittance. The inclusion of Pt nanoparticles enhanced the electrical conductivity of the SnO{sub 2} thin films compared to their pristine forms. The chemical bonding state of the films was analyzed by X-ray photoelectron spectroscopy to investigate the effect of the Pt nanoparticles on the carrier concentration in the film. It was concluded that the reduction of SnO{sub 2} thin films by Pt nanoparticles progressed as a result of the presence of the Pt nanoparticles, causing an oxygen deficiency to develop in SnO{sub 2} and thereby influencing the carrier concentration of the film.

• OSTI ID: 22345253
• Journal Information: Materials Research Bulletin, Journal Name: Materials Research Bulletin Vol. 52; ISSN MRBUAC; ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CHEMICAL BONDS
DEPOSITION
ELECTRIC CONDUCTIVITY
INCLUSIONS
NANOPARTICLES
OPTICAL PROPERTIES
OXYGEN
SOL-GEL PROCESS
SOLUTIONS
THIN FILMS
TIN OXIDES
X-RAY PHOTOELECTRON SPECTROSCOPY