Diagnostics principle of microwave cut-off probe for measuring absolute electron density
- Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 305-701 (Korea, Republic of)
A generalized diagnostics principle of microwave cut-off probe is presented with a full analytical solution. In previous studies on the microwave cut-off measurement of weakly ionized plasmas, the cut-off frequency ω{sub c} of a given electron density is assumed to be equal to the plasma frequency ω{sub p} and is predicted using electromagnetic simulation or electric circuit model analysis. However, for specific plasma conditions such as highly collisional plasma and a very narrow probe tip gap, it has been found that ω{sub c} and ω{sub p} are not equal. To resolve this problem, a generalized diagnostics principle is proposed by analytically solving the microwave cut-off condition Re[ε{sub r,eff}(ω = ω{sub c})] = 0. In addition, characteristics of the microwave cut-off condition are theoretically tested for correct measurement of the absolute electron density.
- OSTI ID:
- 22303601
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 8 Vol. 21; ISSN PHPAEN; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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