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Title: Origin of bending in uncoated microcantilever - Surface topography?

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4863675· OSTI ID:22280530
; ; ; ;  [1]
  1. Materials Science Group, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102 (India)

We provide direct experimental evidence to show that difference in surface topography on opposite sides of an uncoated microcantilever induces bending, upon exposure to water molecules. Examination on opposite sides of the microcantilever by atomic force microscopy reveals the presence of localized surface features on one side, which renders the induced stress non-uniform. Further, the root mean square inclination angle characterizing the surface topography shows a difference of 73° between the opposite sides. The absence of deflection in another uncoated microcantilever having similar surface topography confirms that in former microcantilever bending is indeed induced by differences in surface topography.

OSTI ID:
22280530
Journal Information:
Applied Physics Letters, Vol. 104, Issue 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English