Experimental study on the emission spectra of microwave plasma at atmospheric pressure

Journal Article · Tue Jan 28 00:00:00 EST 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4863119· OSTI ID:22275660

Zhang, Boya; Wang, Qiang; Zhang, Guixin ^[1]; Liao, Shanshan ^[1]

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1. Department of Electrical Engineering, Tsinghua University, Beijing 100084 (China)

An experimental study on microwave plasma at atmospheric pressure was conducted by employing optical emission spectroscopy. Based on a microwave plasma generation device developed for nanoparticle synthesis, we studied the influence of input microwave power and gas flow rate on the optical emission behaviors and electron temperature of plasma using Ar, He, and N{sub 2} as working gas, respectively. The physics behind these behaviors was discussed. The results are useful in characterizing microwave plasma at atmospheric pressure and can be used for improving nanoparticle synthesis system for commercial use in the future.

• OSTI ID: 22275660
• Journal Information: Journal of Applied Physics, Vol. 115, Issue 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
77 NANOSCIENCE AND NANOTECHNOLOGY
ATMOSPHERIC PRESSURE
ELECTRON TEMPERATURE
EMISSION SPECTRA
EMISSION SPECTROSCOPY
GAS FLOW
MICROWAVE RADIATION
NANOSTRUCTURES
PARTICLE SIZE
PLASMA
PLASMA PRESSURE
PLASMA PRODUCTION
SYNTHESIS