Spectroscopy analysis of graphene like deposition using DC unbalanced magnetron sputtering on γ‐Al{sub 2}O{sub 3} buffer layer

Journal Article · Mon Feb 24 00:00:00 EST 2014 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4866758· OSTI ID:22266026

Aji, A. S., E-mail: [e-mail]; Darma, Y., E-mail: [e-mail] ^[1]

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1. Quantum Semiconductor and Devices Lab., Dept. of Physics, Institut Teknologi Bandung, Ganesa 10 Bandung, 40132 (Indonesia)

In this work, graphene-like deposition using DC unbalanced magnetron-sputtering technique on γ‐Al{sub 2}O{sub 3} layer at low temperature has been systematically studied. The γ‐Al{sub 2}O{sub 3} was growth on silicon substrate using thermal evaporation of Al wire and continuing with dry oxidation of Al at 550 °C. Sputtering process were carried out using Fe-doped carbon pellet as a target by maintain the chamber pressure of 4.6×10{sup −2} Torr at substrate temperature of 300 °C for time deposition range of 1 to 4 hours. The quality of Al{sub 2}O{sub 3} on Si(100) and the characteristic of carbon thin film on γ‐Al{sub 2}O{sub 3} were analized by mean XRD, opctical microscopy, EDAX, FTIR, and Raman spectra. XRD and optical microscopy analysis shows that Al{sub 2}O{sub 3} film is growth uniformly on Si substrate and forming the γ phase of Al{sub 2}O{sub 3}. Raman and FTIR spectra confirm the formation of graphene like carbon layer on Al{sub 2}O{sub 3}. Additionally, thermal annealing for some sample series have been performed to study their structural stability. The change of atomic structure due to thermal annealing were analized by XRD spectra. The quality and the number of graphene layers are investigated by using Raman spectra peaks analysis.

• OSTI ID: 22266026
• Journal Information: AIP Conference Proceedings, Vol. 1586, Issue 1; Conference: NNS2013: 5. nanoscience and nanotechnology symposium, Surabaya (Indonesia), 23-25 Oct 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
77 NANOSCIENCE AND NANOTECHNOLOGY
ALUMINIUM OXIDES
ANNEALING
DEPOSITION
DOPED MATERIALS
FOURIER TRANSFORMATION
GRAPHENE
INFRARED SPECTRA
LAYERS
MAGNETRONS
OPTICAL MICROSCOPY
RAMAN SPECTRA
SPECTROSCOPY
SPUTTERING
SUBSTRATES
THIN FILMS
X-RAY DIFFRACTION