Development of a chip-based ingroove microplasma source: Design, characterization, and diagnostics
- Research Center of Analytical Instrumentation, College of Chemistry and College of Life Science Sichuan University, Chengdu (China)
- State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an (China)
A chip-based ingroove microplasma source was designed for molecular emission spectrometry by using a space-confined direct current duct in air. The voltage-current characteristics of different size generators, emission spectroscopy of argon were discussed, respectively. It is found that the emission intensity of excited Ar and N{sub 2} approaches its maximum near the cathode, while OH and O peaks most likely appear close to the anode. The electron density, electronic excitation temperature, rotational temperature, and vibrational temperature of the argon plasma were also calculated. More importantly, the chip-based ingroove microplasma shows much better stability compared with its counterparts.
- OSTI ID:
- 22257062
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 10 Vol. 104; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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