Development of a chip-based ingroove microplasma source: Design, characterization, and diagnostics

Journal Article · Mon Mar 10 00:00:00 EDT 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4867484· OSTI ID:22257062

Li, Xuemei; Meng, Fanying; Yuan, Xin; Yan, Yanyue; Zhao, Zhongjun; Duan, Yixiang ^[1]; Tang, Jie ^[2]

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1. Research Center of Analytical Instrumentation, College of Chemistry and College of Life Science Sichuan University, Chengdu (China)
2. State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an (China)

A chip-based ingroove microplasma source was designed for molecular emission spectrometry by using a space-confined direct current duct in air. The voltage-current characteristics of different size generators, emission spectroscopy of argon were discussed, respectively. It is found that the emission intensity of excited Ar and N{sub 2} approaches its maximum near the cathode, while OH and O peaks most likely appear close to the anode. The electron density, electronic excitation temperature, rotational temperature, and vibrational temperature of the argon plasma were also calculated. More importantly, the chip-based ingroove microplasma shows much better stability compared with its counterparts.

• OSTI ID: 22257062
• Journal Information: Applied Physics Letters, Vol. 104, Issue 10; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
77 NANOSCIENCE AND NANOTECHNOLOGY
ARGON
DESIGN
DIRECT CURRENT
EMISSION SPECTROSCOPY
MICROELECTRONICS
PERFORMANCE
PLASMA