Electron ionization of open/closed chain isocarbonic molecules relevant in plasma processing: Theoretical cross sections

Journal Article · Tue Jan 28 04:00:00 EST 2014 · Journal of Chemical Physics

DOI:https://doi.org/10.1063/1.4862056· OSTI ID:22255232

Joshipura, K. N.; Pandya, Siddharth H. ^[1]; Kothari, Harshit N. ^[2]

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1. Sardar Patel University, Vallabh Vidyanagar-388120, Gujarat (India)
2. Universal College of Engineering and Technology, Moti Bhoyan, Gandhinagar-382721, Gujarat (India)

In this paper, we report theoretical electron impact ionization cross sections from threshold to 2000 eV for isocarbonic open chain molecules C{sub 4}H{sub 6}, C{sub 4}H{sub 8}, C{sub 4}F{sub 6} including their isomers, and closed chain molecules c-C{sub 4}H{sub 8} and c-C{sub 4}F{sub 8}. Theoretical formalism employed presently, viz., Complex Scattering Potential-ionization contribution method has been used successfully for a variety of polyatomic molecules. The present ionization calculations are very important since results available for the studied targets are either scarce or none. Our work affords comparison of C{sub 4} containing hydrocarbon versus fluorocarbon molecules. Comparisons of the present ionization cross sections are made wherever possible, and new ionization data are also presented.

• OSTI ID: 22255232
• Journal Information: Journal of Chemical Physics, Journal Name: Journal of Chemical Physics Journal Issue: 4 Vol. 140; ISSN JCPSA6; ISSN 0021-9606
• Country of Publication: United States
• Language: English

Related Subjects

2-METHYLPROPENE
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
BUTADIENE
CROSS SECTIONS
IONIZATION
ISOMERS
MOLECULES
PLASMA
SCATTERING