skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Electron ionization of open/closed chain isocarbonic molecules relevant in plasma processing: Theoretical cross sections

Journal Article · · Journal of Chemical Physics
DOI:https://doi.org/10.1063/1.4862056· OSTI ID:22255232
;  [1];  [2]
  1. Sardar Patel University, Vallabh Vidyanagar-388120, Gujarat (India)
  2. Universal College of Engineering and Technology, Moti Bhoyan, Gandhinagar-382721, Gujarat (India)

In this paper, we report theoretical electron impact ionization cross sections from threshold to 2000 eV for isocarbonic open chain molecules C{sub 4}H{sub 6}, C{sub 4}H{sub 8}, C{sub 4}F{sub 6} including their isomers, and closed chain molecules c-C{sub 4}H{sub 8} and c-C{sub 4}F{sub 8}. Theoretical formalism employed presently, viz., Complex Scattering Potential-ionization contribution method has been used successfully for a variety of polyatomic molecules. The present ionization calculations are very important since results available for the studied targets are either scarce or none. Our work affords comparison of C{sub 4} containing hydrocarbon versus fluorocarbon molecules. Comparisons of the present ionization cross sections are made wherever possible, and new ionization data are also presented.

OSTI ID:
22255232
Journal Information:
Journal of Chemical Physics, Vol. 140, Issue 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-9606
Country of Publication:
United States
Language:
English

Similar Records

Impact of hydrofluorocarbon molecular structure parameters on plasma etching of ultra-low-K dielectric
Journal Article · Sun May 15 00:00:00 EDT 2016 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:22255232

Electron-impact total ionization cross sections of CF{sub 4}, C{sub 2}F{sub 6}, and C{sub 3}F{sub 8}
Journal Article · Mon Feb 01 00:00:00 EST 1999 · Journal of Chemical Physics · OSTI ID:22255232

Ionization of gases by a pulsed electron beam as studied by self-focusing. II. Polyatomic gases
Journal Article · Tue Sep 15 00:00:00 EDT 1981 · J. Chem. Phys.; (United States) · OSTI ID:22255232